发明专利
JP2006111516A Composition for forming ferroelectric thin film and ferroelectric thin film as well as liquid injection head
审中-公开
用于形成液体薄膜和铁电薄膜的组合物作为液体注射头
- 专利标题: Composition for forming ferroelectric thin film and ferroelectric thin film as well as liquid injection head
- 专利标题(中): 用于形成液体薄膜和铁电薄膜的组合物作为液体注射头
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申请号: JP2005004357申请日: 2005-01-11
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公开(公告)号: JP2006111516A公开(公告)日: 2006-04-27
- 发明人: KAMEI HIROYUKI
- 申请人: Seiko Epson Corp , セイコーエプソン株式会社
- 专利权人: Seiko Epson Corp,セイコーエプソン株式会社
- 当前专利权人: Seiko Epson Corp,セイコーエプソン株式会社
- 优先权: JP2004272094 2004-09-17; JP2005004357 2005-01-11
- 主分类号: C04B35/00
- IPC分类号: C04B35/00 ; B41J2/045 ; B41J2/055 ; B41J2/135 ; B41J2/14 ; B41J2/145 ; B41J2/16 ; B82Y10/00 ; B82Y30/00 ; B82Y40/00 ; C01G25/00 ; C01G33/00 ; C01G35/00 ; C01G53/00 ; C04B35/49 ; C04B35/491 ; H01L21/316 ; H01L41/09 ; H01L41/187
摘要:
PROBLEM TO BE SOLVED: To provide a composition for forming a ferroelectric thin film capable of forming a high-density film and having excellent storage stability, and a ferroelectric thin film as well as a liquid injection head. SOLUTION: The composition for forming the ferroelectric thin film comprises at least a colloidal solution, containing a metal constituting the ferroelectric thin film, having an average colloidal particle diameter of 1-100 nm, and providing a particle size distribution having two or more peaks. And the ferroelectric thin film is made of the composition for forming the ferroelectric thin film, and the liquid injection head is provided with a piezoelectric element having the ferroelectric thin film. COPYRIGHT: (C)2006,JPO&NCIPI
公开/授权文献
- JP3113631U Mounting device of a small fan 公开/授权日:2005-09-15
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