发明专利
JP2006111516A Composition for forming ferroelectric thin film and ferroelectric thin film as well as liquid injection head 审中-公开
用于形成液体薄膜和铁电薄膜的组合物作为液体注射头

Composition for forming ferroelectric thin film and ferroelectric thin film as well as liquid injection head
摘要:
PROBLEM TO BE SOLVED: To provide a composition for forming a ferroelectric thin film capable of forming a high-density film and having excellent storage stability, and a ferroelectric thin film as well as a liquid injection head. SOLUTION: The composition for forming the ferroelectric thin film comprises at least a colloidal solution, containing a metal constituting the ferroelectric thin film, having an average colloidal particle diameter of 1-100 nm, and providing a particle size distribution having two or more peaks. And the ferroelectric thin film is made of the composition for forming the ferroelectric thin film, and the liquid injection head is provided with a piezoelectric element having the ferroelectric thin film. COPYRIGHT: (C)2006,JPO&NCIPI
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