公开(公告)号：JP2011109112A

公开(公告)日：2011-06-02

申请号：JP2010263546

申请日：2010-11-26

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： SHIMADA KATSUTO ,  KAMEI HIROYUKI ,  TAKAHASHI TETSUJI ,  QIU HONG

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  C04B35/493 ,  C23C14/34 ,  H01L41/08 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/319

摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric thin element with a high piezoelectric strain constant and an excellent adhesion with lower electrode without having the occurrence of cracks in a film during manufacturing, and to provide an inkjet recording head that has the piezoelectric thin element, thereby achieving printing with high definition. SOLUTION: The piezoelectric thin element includes: a piezoelectric element film 11A composed of a polycrystalline substance; an upper electrode 16; and a lower electrode 12 arranged with the piezoelectric element film 11A interposed therebetween. The crystalline body 11A of the piezoelectric film is formed in the direction almost perpendicular to the surface of the electrode. COPYRIGHT: (C)2011,JPO&INPIT

摘要翻译： 解决的问题：为了提供具有高压电应变常数和与下电极的优异粘附性的压电薄元件，而不会在制造期间在膜中出现裂纹，并且提供一种喷墨记录头，其具有压电 薄元件，从而实现高清晰度的打印。 解决方案：压电薄元件包括：由多晶物质构成的压电元件膜11A; 上电极16; 以及设置有压电元件膜11A的下部电极12。 压电膜的结晶体11A形成在与电极表面几乎垂直的方向上。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2008078407A

公开(公告)日：2008-04-03

申请号：JP2006256202

申请日：2006-09-21

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/29

摘要： PROBLEM TO BE SOLVED: To provide an actuator device having improved response properties of vibration and durability, and to provide a fluid injecting head. SOLUTION: The actuator device has a piezoelectric element comprising a lower electrode provided at one surface side of a substrate, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer; the lower electrode contains an electrode material made of a noble metal; and a density elasticity adjustment layer made of an alloy of an electrode material made of the noble metal and a density elasticity adjustment material having density that is lower than that of the electrode material and having a Young's modulus that is lower than that of the electrode material. COPYRIGHT: (C)2008,JPO&INPIT

摘要翻译： 要解决的问题：提供具有改善的振动和耐久性的响应特性的致动器装置，并且提供流体注入头。 解决方案：致动器装置具有压电元件，其包括设置在基板的一个表面侧的下电极，设置在下电极上的压电层和设置在压电层上的上电极; 下电极包含由贵金属制成的电极材料; 以及由贵金属制成的电极材料的合金和密度低于电极材料的密度弹性调节材料的杨氏模量低于电极材料的密度弹性调节层 。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007306015A

公开(公告)日：2007-11-22

申请号：JP2007160551

申请日：2007-06-18

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/15 ,  B41J2/16 ,  C04B35/638 ,  H01L41/187 ,  H01L41/22 ,  H01L41/318

摘要： PROBLEM TO BE SOLVED: To provide a process for manufacturing a piezoelectric element in which uniformity of piezoelectric characteristics can be enhanced.
SOLUTION: The process for manufacturing a piezoelectric element comprises a step for drying sol of organic metal, and a step for degreasing it where a substrate 512 is heated by applying one side of the substrate entirely and tightly to a hot plate 100. More specifically, there are a method employing a substrate suction type hot plate equipped with a small hole 104, and a method for applying a load by means of a weight 101. Alternatively, the substrate 512 may be pressed tightly onto a metal plate 105 and mounted on the hot plate 100 with warp being corrected. Furthermore, it may be heated not through heat conduction but through radiation by placing a ceramic plate 102 on the hot plate 100 or using an electric heating wire.
COPYRIGHT: (C)2008,JPO&INPIT

摘要翻译： 要解决的问题：提供一种可以提高压电特性均匀性的压电元件的制造方法。 解决方案：用于制造压电元件的方法包括用于干燥有机金属溶胶的步骤，以及通过将基板的一侧完全紧密地施加到热板100来加热基板512的脱脂步骤。 更具体地说，存在采用装有小孔104的基板抽吸式加热板的方法，以及通过重物101施加负载的方法。或者，可以将基板512紧压在金属板105上， 安装在加热板100上，其中经线被校正。 此外，通过将陶瓷板102放置在热板100上或使用电加热丝，可以不通过热传导而通过辐射加热。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007200960A

公开(公告)日：2007-08-09

申请号：JP2006014664

申请日：2006-01-24

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01L41/22

摘要： PROBLEM TO BE SOLVED: To provide a method for evaluating a piezoelectric element for accurate evaluation of close adhesion of a layer forming the piezoelectric element. SOLUTION: This evaluation method is capable of executing evaluation of the degree of close adhesion of the layer constituting a piezoelectric element formed under each film forming condition. The method sequentially conducts until an order of superiority of determination result may be attained for a testing piece under each film forming condition, a first determining step of measuring peeling strength of each testing piece with the m-ELT method to determine a rate in the number of testing pieces having generated peeling at the time of measurement, by manufacturing, under different film forming conditions, a plurality of the testing pieces including at least a lower electrode film to constitute a piezoelectric element on the predetermined substrate; a second determining step of determining peeling interface of the testing piece having generated the peeling; a third determining step of determining a peeling are; and a fourth determining step of determining peeling strength. COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 要解决的问题：提供一种用于评价压电元件的方法，用于精确评估形成压电元件的层的紧密粘合性。 解决方案：该评估方法能够执行构成在每个成膜条件下形成的压电元件的层的紧密附着度的评估。 该方法依次进行，直到在每个成膜条件下对于测试片达到确定结果的优越次序，第一确定步骤，使用m-ELT方法测量每个测试片的剥离强度，以确定数量的速率 通过在不同的成膜条件下制造至少包含下电极膜的多个测试片，以在预定的衬底上构成压电元件; 确定已经产生剥离的测试片的剥离界面的第二确定步骤; 确定剥离的第三确定步骤是： 以及确定剥离强度的第四确定步骤。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2007019084A

公开(公告)日：2007-01-25

申请号：JP2005196316

申请日：2005-07-05

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： B41J2/055 ,  B41J2/045 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/08 ,  H01L41/09 ,  H01L41/187 ,  H01L41/22 ,  H01L41/29 ,  H01L41/317 ,  H01L41/319 ,  H01L41/39

CPC分类号： B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49401

摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric element improving piezoelectric characteristics and the manufacturing method for a liquid injection head. SOLUTION: A lower electrode 60 having an uppermost layer composed of iridium 64, a titanium layer 65, a piezoelectric body layer and an upper electrode are laminated successively on a substrate and the piezoelectric element is formed. The piezoelectric body layer is formed on the titanium layer 65 having the water contact angle of 40° or more of a surface by an MOD method in this case. COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 要解决的问题：提供一种改善压电特性的压电元件的制造方法和液体注入头的制造方法。 解决方案：在基板上依次层叠具有由铱64构成的最上层的下部电极60，钛层65，压电体层和上部电极，形成压电元件。 在这种情况下，通过MOD方法，在表面的水接触角为40°以上的钛层65上形成压电体层。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005153154A

公开(公告)日：2005-06-16

申请号：JP2003390824

申请日：2003-11-20

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/16

摘要： PROBLEM TO BE SOLVED: To provide a liquid jetting head and a liquid jetting apparatus which can surely connect a lead electrode and a connecting line with an enough bonding strength and can improve the reliability.
SOLUTION: The liquid jetting head is equipped with a passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings 21 for jetting a liquid are formed, piezoelectric elements 300 set via a vibrating plate at one face side of the passage formation substrate 10 to generate a pressure change in the pressure generation chambers 12, and the lead electrodes 90 led out from the piezoelectric elements 300 onto the passage formation substrate 10. The connecting line 130 consists of a bonding wire with at least one end connected to a driving IC 120 for driving the piezoelectric element 300. A connection region 90a of the lead electrode 90 to which the other end of the connecting line 130 is connected is occupied by a recess by a ratio of not larger than 10%. A recess width of the recess is not larger than 0.7 μm and a recess depth of the recess is not smaller than 10 nm.
COPYRIGHT: (C)2005,JPO&NCIPI

摘要翻译： 要解决的问题：提供一种能够以足够的接合强度可靠地连接引线电极和连接线的液体喷射头和液体喷射装置，并且可以提高可靠性。 解决方案：液体喷射头配备有通道形成基板10，其中形成有与用于喷射液体的喷嘴开口21连通的压力产生室12，通过振动板在通道形成的一个表面侧设置的压电元件300 基板10，以在压力产生室12中产生压力变化，以及从压电元件300导出到通道形成基板10上的引线电极90.连接线130由至少一端连接到 用于驱动压电元件300的驱动IC 120.连接线130的另一端连接的引线电极90的连接区域90a以不大于10％的比例占据凹部。 凹部的凹部宽度不大于0.7μm，凹部的凹部深度不小于10nm。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004284256A

公开(公告)日：2004-10-14

申请号：JP2003080957

申请日：2003-03-24

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： B41J2/16 ,  B41J2/045 ,  B41J2/055 ,  H01L41/08 ,  H01L41/09

CPC分类号： B41J2002/14241 ,  B41J2002/14419

摘要： PROBLEM TO BE SOLVED: To provide a method for easily and certainly inspecting the presence of cracks in a vibrating sheet of an ink jet recording head.
SOLUTION: This method comprises a first and a second inspection process as shown below. The first inspection process is to arrange a master work 111 enclosing a piezoelectric element retaining part in a successfully sealed state and a specimen 110, inside sealed spaces 131 and 130 having the same volume; measure the inner pressure of the sealed spaces 130 and 131 by pressurizing the sealed spaces 130 and 131 by the same pressure; and inspect the presence of cracks in the vibrating sheet and the sealed state of the piezoelectric element retaining part 31 by comparing the pressures of the measured sealed spaces 130 and 131. The second inspection process is to fill the sealed space 130 with an inspection gas under pressure after making vacuous the sealed space 130 wherein the specimen 110 passing an inspection in the first inspection process is arranged, and replace an atmospheric gas inside the sealed space 130 with nitrogen and inspect the microcracks of the vibrating sheet and the sealed state of the piezoelectric element retaining part 31 by checking the presence of the inspection gas after evacuating all the gas from inside the sealed space 130.
COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2011187789A

公开(公告)日：2011-09-22

申请号：JP2010052821

申请日：2010-03-10

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAZAMA HIRONOBU ,  KAMIJO TAKAHIRO ,  SHIMADA KATSUTO ,  KAMEI HIROYUKI ,  YONEKURA YUKA ,  TAKABE HONKI

IPC分类号： H01L41/08 ,  B41J2/14 ,  B41J2/16 ,  B81C1/00 ,  H01L41/09 ,  H01L41/18 ,  H01L41/22 ,  H01L41/29 ,  H01L41/39

CPC分类号： B41J2/1646 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2002/14241 ,  B41J2002/14419 ,  C23C16/52 ,  H01L21/3065 ,  H01L21/32136 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/314 ,  H01L41/318 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49401

摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator that causes small variations in the hysteresis characteristics of a piezoelectric element. SOLUTION: In a spatter etching for improving adhesion with an upper electrode 80 and lead electrode, the residence time of Ar ions on a surface of the upper electrode 80 is reduced by Ar gas flow carried out by Ar gas introduction by spatter etching the surface of the upper electrode of 80 while introducing the Ar gas at a flow rate of 60 sccm or greater. Thus, charge-up caused by ionized Ar gas residing on the surface of the upper electrode 80 is suppressed, and the effect to a piezoelectric element 300 by the charge-up is small. This results in obtaining a method of manufacturing the piezoelectric actuator that causes small variations, of not only the hysteresis characteristics but also the displacement characteristics, in a piezoelectric layer 70 of the piezoelectric element 300. COPYRIGHT: (C)2011,JPO&INPIT

摘要翻译： 要解决的问题：提供一种制造压电元件的滞后特性变化小的压电致动器的方法。 解决方案：在用于改善与上电极80和引线电极的粘附性的溅射蚀刻中，Ar离子在上电极80的表面上的停留时间通过由Ar气引入的Ar气流减少，溅射蚀刻 上部电极的表面80，同时以60sccm或更大的流速引入Ar气体。 因此，抑制了驻留在上部电极80的表面上的电离Ar气体的充电，并且通过充电对压电元件300的影响小。 这导致获得压电元件300的压电层70中不仅产生滞后特性而且位移特性变小的压电致动器的制造方法。（C）2011，JPO＆INPIT

公开(公告)号：JP2007027330A

公开(公告)日：2007-02-01

申请号：JP2005206087

申请日：2005-07-14

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01L21/316 ,  B82Y10/00 ,  B82Y30/00 ,  C01G25/00 ,  H01L41/187 ,  H01L41/318 ,  H01L41/39

摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a composition for ferroelectric thin film formation which significantly reduces the variation in quality for every manufacturing lot. SOLUTION: A colloidal solution is formed by mixing a carrier fluid and a metallic component containing a material to be made into a ferroelectric thin film, and by heating at a temperature higher than normal temperature. Then, the colloidal solution is cooled to a temperature lower than normal temperature so as to manufacture a composition for the ferroelectric thin film formation. COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 要解决的问题：提供一种用于铁电薄膜形成的组合物的制造方法，其显着降低了每个制造批次的质量变化。 解决方案：通过将载体流体和含有要制成的材料的金属组分混合成铁电薄膜并通过在比常温高的温度下加热来形成胶体溶液。 然后，将胶体溶液冷却至比常温低的温度，以制造用于铁电薄膜形成的组合物。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006093042A

公开(公告)日：2006-04-06

申请号：JP2004280309

申请日：2004-09-27

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01B3/12 ,  B41J2/045 ,  B41J2/055 ,  B41J2/16 ,  B81B3/00 ,  C01G25/00 ,  C09D1/00 ,  H01L41/09 ,  H01L41/187 ,  H02N2/00

摘要： PROBLEM TO BE SOLVED: To provide a composition for forming a ferroelectric thin film that is capable of comparatively easily controlling film thickness and to provide the ferroelectric thin film and a liquid jet head.
SOLUTION: The composition for forming a ferroelectric thin film contains at least colloidal solution, containing a metal which is the material for constituting a ferroelectric thin film, and its dynamic surface tension force becomes larger as air bubble occurrence frequency rises. The dielectric thin film is formed from the composition for forming a ferroelectric thin film, and the liquid jet head equipped with a piezoelectric element that has the ferroelectric thin film.
COPYRIGHT: (C)2006,JPO&NCIPI

摘要翻译： 要解决的问题：提供一种能够相对容易地控制膜厚度并提供铁电薄膜和液体喷射头的形成铁电薄膜的组合物。 解决方案：用于形成铁电薄膜的组合物至少含有作为构成铁电薄膜的材料的金属的胶体溶液，并且随着气泡发生频率的上升，其动态表面张力变大。 电介质薄膜由用于形成铁电薄膜的组合物和装备有具有铁电薄膜的压电元件的液体喷射头形成。 版权所有（C）2006，JPO＆NCIPI