Invention Patent
JP2013026608A Manufacturing method of actuator, switching device, transmission path switching device, and testing device
有权
执行器,切换装置,传动路径切换装置和测试装置的制造方法
- Patent Title: Manufacturing method of actuator, switching device, transmission path switching device, and testing device
- Patent Title (中): 执行器,切换装置,传动路径切换装置和测试装置的制造方法
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Application No.: JP2011163277Application Date: 2011-07-26
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Publication No.: JP2013026608APublication Date: 2013-02-04
- Inventor: HORI HISAO , ABE SACHIKAZU , SATO YOSHIHIRO
- Applicant: Advantest Corp , 株式会社アドバンテスト
- Assignee: Advantest Corp,株式会社アドバンテスト
- Current Assignee: Advantest Corp,株式会社アドバンテスト
- Priority: JP2011163277 2011-07-26
- Main IPC: H01L41/22
- IPC: H01L41/22 ; G01R31/28 ; H01H57/00 ; H01L41/09 ; H01L41/18 ; H01L41/187
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a bimorph type piezoelectric actuator which enables long life, a switching device, a transmission path switching device, and a testing device.SOLUTION: A manufacturing method of a bimorph type piezoelectric actuator includes: a first piezoelectric element layer formation stage where a first piezoelectric element layer is formed on a substrate; a support layer formation stage where a support layer of an insulator is formed on the first piezoelectric element layer; a second piezoelectric element layer formation stage where a second piezoelectric element layer is formed on the support layer; and a removal stage where a part of the substrate is removed to form an actuator having the first piezoelectric element layer, the support layer, the second piezoelectric element layer.
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