Invention Patent
JP2013026608A Manufacturing method of actuator, switching device, transmission path switching device, and testing device 有权
执行器,切换装置,传动路径切换装置和测试装置的制造方法

Manufacturing method of actuator, switching device, transmission path switching device, and testing device
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a bimorph type piezoelectric actuator which enables long life, a switching device, a transmission path switching device, and a testing device.SOLUTION: A manufacturing method of a bimorph type piezoelectric actuator includes: a first piezoelectric element layer formation stage where a first piezoelectric element layer is formed on a substrate; a support layer formation stage where a support layer of an insulator is formed on the first piezoelectric element layer; a second piezoelectric element layer formation stage where a second piezoelectric element layer is formed on the support layer; and a removal stage where a part of the substrate is removed to form an actuator having the first piezoelectric element layer, the support layer, the second piezoelectric element layer.
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