- 专利标题: A method of manufacturing a semiconductor device
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申请号: JP2001074268申请日: 2001-03-15
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公开(公告)号: JP4258984B2公开(公告)日: 2009-04-30
- 发明人: 道生 宇留野 , 雅昭 安田 , 健男 富山 , 隆行 松崎 , 恵一 畠山 , 禎一 稲田
- 申请人: 日立化成工業株式会社
- 专利权人: 日立化成工業株式会社
- 当前专利权人: 日立化成工業株式会社
- 优先权: JP2001074268 2001-03-15
- 主分类号: C09J7/00
- IPC分类号: C09J7/00 ; C09J163/00 ; C09J201/00 ; H01L21/52 ; H01L23/12 ; H01L25/065 ; H01L25/07 ; H01L25/18
摘要:
PROBLEM TO BE SOLVED: To provide an adhesive film useful for connecting semiconductor chips, forming no space even when heated and press-adhered at a small pressure, capable of connecting a semiconductor chip to a member for outside connection or semiconductors to each other, and having excellent press adhesivity and excellent workability in the press-adhesion process, to provide a connection member which is used for semiconductors, uses the adhesive film and has high reliability, and to provide a semiconductor device. SOLUTION: This adhesive film can heat and press-adhere a semiconductor chip to a wiring member for loading the semiconductor chip and for outside connection, or the semiconductor chip to an another semiconductor chip at a press-adhesion pressure of 0.01 to 0.5 MPa. The adhesive film can preferably heat and press-adhere the semiconductor chip and the like in conditions satisfying formula 1: 1×10 (1) [F is press-adhesion pressure; (t) is a press adhesion time; and (η) is a melt viscosity at a press adhesive temperature]. The adhesive film preferably has a melt viscosity of >=1×10 Pa.s at a temperature of Pa.s at a press-adhesion temperature.
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