Invention Grant
- Patent Title: Method of manufacturing a nanostructured spectral filter
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Application No.: US15280544Application Date: 2016-09-29
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Publication No.: US10014337B2Publication Date: 2018-07-03
- Inventor: Romain Girard Desprolet , Michel Marty , Salim Boutami , Sandrine Lhostis
- Applicant: STMicroelectronics SA , STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Montrouge FR Crolles
- Assignee: STMicroelectronics SA,STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics SA,STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Montrouge FR Crolles
- Agency: Crowe & Dunlevy
- Priority: FR1559267 20150930
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L27/146 ; G02B5/20 ; G02F1/1335 ; G02B5/00 ; B82Y20/00
Abstract:
A spectral filter is manufactured using a process wherein a first rectangular bar is formed within a first layer made of a first material, said first rectangular bar being made of a second material having a different optical index. The process further includes, in a second layer over the first layer, a second rectangular bar made of the second material. The second rectangular bar is positioned in contact with the first rectangular bar. The second layer is also made of the first material.
Public/Granted literature
- US20170092678A1 METHOD OF MANUFACTURING A NANOSTRUCTURED SPECTRAL FILTER Public/Granted day:2017-03-30
Information query
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