Invention Grant
- Patent Title: Stacked SPAD image sensor
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Application No.: US14980386Application Date: 2015-12-28
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Publication No.: US10014340B2Publication Date: 2018-07-03
- Inventor: Ming-Hsien Yang , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung , Shyh-Fann Ting , Chun-Yuan Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/0352 ; H01L31/107

Abstract:
The present disclosure relates to a stacked SPAD image sensor with a CMOS Chip and an imaging chip bonded together, to improve the fill factor of the SPAD image sensor, and an associated method of formation. In some embodiments, the imaging chip has a plurality of SPAD cells disposed within a second substrate. The CMOS Chip has a first interconnect structure disposed over a first substrate. The imaging chip has a second interconnect structure disposed between the second substrate and the first interconnect structure. The CMOS Chip and the imaging chip are bonded together through along an interface disposed between the first interconnect structure and the second interconnect structure.
Public/Granted literature
- US20170186798A1 STACKED SPAD IMAGE SENSOR Public/Granted day:2017-06-29
Information query
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