Invention Grant
- Patent Title: Measurement device, measurement system, and measurement method for measuring particle and gas
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Application No.: US15398887Application Date: 2017-01-05
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Publication No.: US10018548B2Publication Date: 2018-07-10
- Inventor: Osamu Tsuboi , Michio Ushigome , Satoru Momose
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Main IPC: G01N15/02
- IPC: G01N15/02 ; G01N25/18 ; G01N27/16 ; G01N15/14
Abstract:
A measurement device includes a first flow passage, a heating unit provided on one end side of the first flow passage, a gas detection unit provided on one end side of the first flow passage and capable of detecting a gas through heat applied from the heating unit, and a particle measurement unit which optically measures, at an upper side than the heating unit of the first flow passage, particles passing through the first flow passage.
Public/Granted literature
- US20170115196A1 MEASUREMENT DEVICE, MEASUREMENT SYSTEM, AND MEASUREMENT METHOD FOR MEASURING PARTICLE AND GAS Public/Granted day:2017-04-27
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