Invention Grant
- Patent Title: Bulb-shaped memory stack structures for direct source contact in three-dimensional memory device
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Application No.: US15458269Application Date: 2017-03-14
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Publication No.: US10020363B2Publication Date: 2018-07-10
- Inventor: Hiroyuki Ogawa , Yasuo Kasagi , Satoshi Shimizu , Kazuyo Matsumoto , Yohei Masamori , Jixin Yu , Tong Zhang , James Kai
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L27/11524 ; H01L27/11529 ; H01L27/11556 ; H01L27/1157 ; H01L27/11573 ; H01L27/11582

Abstract:
Sacrificial semiconductor material portions are connected by a sacrificial semiconductor line extending along a different horizontal direction and protruding into an underlying source conductive layer. After formation of a vertically alternating stack of insulating layers and spacer material layers, memory stack structures are formed through the vertically alternating stack and through the sacrificial semiconductor material portions. A backside trench can be formed through the vertically alternating stack employing the sacrificial semiconductor line as an etch stop structure. Source strap material portions providing lateral electrical contact to semiconductor channels of the memory stack structures can be formed by replacement of sacrificial semiconductor material portions and the sacrificial semiconductor line with source strap material portions. Structural-reinforcement portions may be employed to provide structural stability during the replacement process.
Public/Granted literature
- US20180122905A1 BULB-SHAPED MEMORY STACK STRUCTURES FOR DIRECT SOURCE CONTACT IN THREE-DIMENSIONAL MEMORY DEVICE Public/Granted day:2018-05-03
Information query
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