Invention Grant
- Patent Title: Semiconductor memory devices having separation structures
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Application No.: US15349084Application Date: 2016-11-11
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Publication No.: US10026749B2Publication Date: 2018-07-17
- Inventor: Jinwoo Park , Jaeshin Park , Joyoung Park , Jiwoong Sue , Seok-Won Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0002184 20160107
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11582 ; H01L21/768 ; H01L23/528 ; H01L27/02 ; H01L29/06 ; H01L27/11565 ; H01L27/1157 ; H01L27/11575

Abstract:
A semiconductor memory device includes a substrate that includes a first cell array region and a peripheral region, a plurality of stack structures that extend in the first direction on the first cell array region and are spaced apart from each other in a second direction crossing the first direction, an insulation layer that covers the stack structures, and at least one separation structure that extends in the second direction on the peripheral region and penetrates the insulation layer in a direction normal to a top surface of the substrate.
Public/Granted literature
- US20170200736A1 SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2017-07-13
Information query
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