Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US14626911Application Date: 2015-02-19
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Publication No.: US10037909B2Publication Date: 2018-07-31
- Inventor: Tooru Aramaki , Michikazu Morimoto , Kenetsu Yokogawa
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2014-185851 20140912
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; H01L21/683 ; H01T23/00 ; H01J37/32

Abstract:
In a plasma processing apparatus, a connector section with the film-like electrode of a sintered plate of a sample stage to which high-frequency power is supplied includes a conductor section disposed inside a through hole, an upper part of which is bonded to the film-like electrode and a lower part of which is connected to an end of a power supply path of the high-frequency power, and a boss disposed between the conductor section and a substrate surrounding an outer periphery of the conductor section inside the through hole and made of an insulating material. Upper ends of a rod-like member at the center of the conductor section and a socket surrounding the rod-like member are disposed at a position higher than the boss, and an adhesive is prevented from entering between the socket and the rod-like member in the upper end of the socket.
Public/Granted literature
- US20160079107A1 PLASMA PROCESSING APPARATUS Public/Granted day:2016-03-17
Information query
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