Invention Grant
- Patent Title: Bumped electrode arrays for microassemblers
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Application No.: US15391140Application Date: 2016-12-27
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Publication No.: US10043687B2Publication Date: 2018-08-07
- Inventor: Julie A. Bert , David K. Biegelsen , Sourobh Raychaudhuri
- Applicant: Palo Alto Research Center Incorporated
- Applicant Address: US CA Palo Alto
- Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee Address: US CA Palo Alto
- Agency: Womble Bond Dickinson (US) LLP
- Agent Daniel Ovanezian
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L25/065 ; H01L21/68 ; H01L21/683 ; H01L21/687 ; H01L25/00 ; H01L23/00 ; B81C99/00 ; B81C3/00

Abstract:
An apparatus including a bumped electrode array and a method of fabricating a bumped electrode array is disclosed. The method includes providing a substrate for the electrode array. The method also includes disposing a plurality of non-planar structures including electrodes above the substrate of the electrode array. The method further includes disposing a dielectric layer above the plurality of non-planar structures having a defined radius of curvature.
Public/Granted literature
- US20180182650A1 BUMPED ELECTRODE ARRAYS FOR MICROASSEMBLERS Public/Granted day:2018-06-28
Information query
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