Invention Grant
- Patent Title: Piezoelectric thin film, method of manufacturing the same, piezoelectric thin film manufacturing apparatus and liquid ejection head
-
Application No.: US15230969Application Date: 2016-08-08
-
Publication No.: US10065420B2Publication Date: 2018-09-04
- Inventor: Motokazu Kobayashi , Yoshinori Kotani , Naoyuki Koketsu
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2013-249324 20131202
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; H01L41/08 ; B41J2/16 ; H01L41/187 ; H01L41/317 ; H01L41/314 ; H01L41/09
Abstract:
A piezoelectric thin film is manufactured by sequentially executing: a step of coating a substrate by applying a coating solution containing an organic solvent and a piezoelectric thin film precursor to form a coating layer; a step of evaporating the organic solvent from the coating layer in a windless environment to obtain a dried coating layer containing the piezoelectric thin film precursor; and a step of heating the dried coating layer to form a piezoelectric thin film from the dried coating layer containing the piezoelectric thin film precursor.
Public/Granted literature
Information query
IPC分类:
