Invention Grant
- Patent Title: Seam healing of metal interconnects
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Application No.: US15126575Application Date: 2014-06-16
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Publication No.: US10068845B2Publication Date: 2018-09-04
- Inventor: Ramanan V. Chebiam , Christopher J. Jezewski , Tejaswi K. Indukuri , James S. Clarke , John J. Plombon
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2014/042572 WO 20140616
- International Announcement: WO2015/195081 WO 20151223
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L23/532 ; H01L21/321

Abstract:
Embodiments of the present disclosure describe removing seams and voids in metal interconnects and associated techniques and configurations. In one embodiment, a method includes conformally depositing a metal into a recess disposed in a dielectric material to form an interconnect, wherein conformally depositing the metal creates a seam or void in the deposited metal within or directly adjacent to the recess and heating the metal in the presence of a reactive gas to remove the seam or void, wherein the metal has a melting point that is greater than a melting point of copper. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20170084487A1 SEAM HEALING OF METAL INTERCONNECTS Public/Granted day:2017-03-23
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