Invention Grant
- Patent Title: Integrated circuit including an active device for confinement of a light flux defined by trenches having a tiered sidewall
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Application No.: US15051904Application Date: 2016-02-24
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Publication No.: US10073219B2Publication Date: 2018-09-11
- Inventor: Charles Baudot
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Crowe & Dunlevy
- Priority: FR1557883 20150824
- Main IPC: G02B6/12
- IPC: G02B6/12 ; H01L21/763 ; G02B6/122 ; G02F1/025

Abstract:
An integrated circuit includes an active device for confinement of a light flux that is formed in a semiconducting substrate. A confinement rib is separated from two doped zones by two trenches. Each doped zone includes a contacting zone on an upper face. Each trench widens from a bottom wall towards the upper face of the corresponding doped zone. The widening trenches present a sidewall having a tiered profile between the trench and the doped zone. An opposite sidewall presents a straight profile.
Public/Granted literature
- US20170059774A1 INTEGRATED CIRCUIT INCLUDING AN ACTIVE DEVICE FOR CONFINEMENT OF A LIGHT FLUX Public/Granted day:2017-03-02
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