- Patent Title: Apparatuses and methods for forming multiple decks of memory cells
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Application No.: US15849242Application Date: 2017-12-20
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Publication No.: US10079246B2Publication Date: 2018-09-18
- Inventor: Zhenyu Lu , Roger W. Lindsay , Akira Goda , John Hopkins
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/11582 ; G11C16/04 ; G11C16/14 ; H01L27/11573 ; G11C16/26 ; H01L27/11529 ; H01L27/11524 ; H01L21/02 ; H01L27/1157 ; G11C16/34 ; H01L27/11556

Abstract:
Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.
Public/Granted literature
- US20180138196A1 APPARATUSES AND METHODS FOR FORMING MULTIPLE DECKS OF MEMORY CELLS Public/Granted day:2018-05-17
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