Invention Grant
- Patent Title: Cross-point memory and methods for fabrication of same
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Application No.: US14086460Application Date: 2013-11-21
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Publication No.: US10084016B2Publication Date: 2018-09-25
- Inventor: Ombretta Donghi , Marcello Ravasio , Samuele Sciarrillo , Roberto Somaschini
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/24 ; H01L45/00

Abstract:
A method of fabricating a memory device is disclosed. In one aspect, the method comprises patterning a first conductive line extending in a first direction. The method additionally includes forming a free-standing pillar of a memory cell stack on the first conductive line after patterning the first conductive line. Forming the free-standing pillar includes depositing a memory cell stack comprising a selector material and a storage material over the conductive line and patterning the memory cell stack to form the free-standing pillar. The method further includes patterning a second conductive line on the pillar after patterning the memory cell stack, the second conductive line extending in a second direction crossing the first direction.
Public/Granted literature
- US20150137061A1 CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME Public/Granted day:2015-05-21
Information query
IPC分类: