Invention Grant
- Patent Title: Pellicle including a water-soluble adhesive and photomask assembly including the pellicle
-
Application No.: US15254701Application Date: 2016-09-01
-
Publication No.: US10087348B2Publication Date: 2018-10-02
- Inventor: Byungchul Yoo , Sungyong Cho , Jaehyuck Choi , Jeongsu Yang , Donghoon Chung , Han-Shin Lee , Myungjun Kim , Ikjun Kim , Jikang Kim , Jeonghwan Min , Kyoungchae Seo
- Applicant: Samsung Electronics Co., Ltd. , FINE SEMITECH CORP.
- Applicant Address: KR KR
- Assignee: Samsung Electronics Co., Ltd.,Fine Semitech Corp.
- Current Assignee: Samsung Electronics Co., Ltd.,Fine Semitech Corp.
- Current Assignee Address: KR KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0137931 20150930
- Main IPC: C08F8/44
- IPC: C08F8/44 ; C08F220/06 ; C09J133/10 ; G03F1/64 ; G03F1/82 ; C09J133/08 ; C09J133/06 ; C08F6/02 ; C09J133/02

Abstract:
A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.
Public/Granted literature
- US20170088755A1 PELLICLE INCLUDING A WATER-SOLUBLE ADHESIVE AND PHOTOMASK ASSEMBLY INCLUDING THE PELLICLE Public/Granted day:2017-03-30
Information query
IPC分类: