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1.发明授权公开(公告)号：US10087348B2
公开(公告)日：2018-10-02
申请号：US15254701
申请日：2016-09-01
发明人： Byungchul Yoo , Sungyong Cho , Jaehyuck Choi , Jeongsu Yang , Donghoon Chung , Han-Shin Lee , Myungjun Kim , Ikjun Kim , Jikang Kim , Jeonghwan Min , Kyoungchae Seo
IPC分类号： C08F8/44 , C08F220/06 , C09J133/10 , G03F1/64 , G03F1/82 , C09J133/08 , C09J133/06 , C08F6/02 , C09J133/02
摘要： A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.
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2.发明授权公开(公告)号：US11729896B2
公开(公告)日：2023-08-15
申请号：US17468644
申请日：2021-09-07
发明人： Jihoon Na , Mun Ja Kim , Jaewhan Sung , Byungchul Yoo , Jibeom Yoo , Hakseok Lee , Myeongjin Jeong , Hyunjune Cho
CPC分类号： H05G2/008 , G02B5/0891 , G02B5/208 , G03F7/70033 , G03F7/70191 , G03F7/70308 , G03F7/70958
摘要： An apparatus for generating extreme ultraviolet (EUV) light includes a raw material supply unit supplying a plasma source for generating EUV light. An EUV light source unit uses a laser to generate plasma from the plasma source. A filter is configured to extract EUV light from the light. A first protective layer is disposed on a front surface of the filter. A frame having a first region exposing at least a portion of the filter or the first protective layer is disposed on the first protective layer. A width of the first region is smaller than a width of the first protective layer and smaller than or equal to a width of the filter.
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公开(公告)号：US12013796B2
公开(公告)日：2024-06-18
申请号：US17751798
申请日：2022-05-24
发明人： Sangmuk Hwang , Jaegeun Park , Hojun Shim , Byungchul Yoo
CPC分类号： G06F13/1642 , G06F13/161 , G06F13/1689 , G06F13/28
摘要： A storage controller includes a command manager and a direct memory access (DMA) engine. The command manager receives a first submission queue doorbell from an external device, fetches a first command including a first latency from the external device in response to the first submission queue doorbell, and determines a first timing to write a first completion into the external device based on the first latency, the first completion indicating that the first command is completely processed. The DMA engine receives a request signal requesting processing of the first command from the command manager, transfer data, which the first command requests, based on a DMA transfer in response to the request signal, and outputs a complete signal, which indicates that the first command is completely processed, to the command manager.
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4.发明授权公开(公告)号：US11892767B2
公开(公告)日：2024-02-06
申请号：US17211165
申请日：2021-03-24
发明人： Byungchul Yoo , Sunghoon Park , Mun Ja Kim
CPC分类号： G03F1/22 , G03F7/70983
摘要： A stud attachment device for attaching a plurality of studs to a photomask constituting a reticle. The stud attachment device including a body; a plurality of holders extending from the body, the holders allowing the studs to be laid thereon, respectively; and a pressure regulator for independently controlling pressures of the holders when the studs are attached to the photomask.
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5.发明公开公开(公告)号：US20240036460A1
公开(公告)日：2024-02-01
申请号：US18186994
申请日：2023-03-21
发明人： MUN JA KIM , Seung Hyun Lee , Jae Sun Jung , Byungchul Yoo , Byunghoon Lee , Changyoung Jeong , Deok Hyun Kim , Deok Hyun Cho
IPC分类号： G03F1/62
CPC分类号： G03F1/62
摘要： Provided herein are protective membranes for lithography that include a core layer including carbon, an interface layer on the core layer, and a protective layer on the interface layer. The interface layer includes a reactive group bonded to a carbon atom of the core layer and the reactive group includes oxygen or nitrogen. The protective layer includes an element “M”, and the element “M” is bonded to the oxygen or nitrogen of the reactive group.
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公开(公告)号：US11366770B2
公开(公告)日：2022-06-21
申请号：US16983471
申请日：2020-08-03
发明人： Sangmuk Hwang , Jaegeun Park , Hojun Shim , Byungchul Yoo
摘要： A method of operating a storage controller that communicates with a host including a submission queue and a completion queue is provided. The operating method includes receiving a submission queue doorbell from the host, fetching a first command including a latency from the submission queue of the host in response to the received submission queue doorbell, processing the fetched first command, and writing a first completion, which indicates that the first command is completely processed, into the completion queue of the host at a timing based on the latency.
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公开(公告)号：US12018183B2
公开(公告)日：2024-06-25
申请号：US17516428
申请日：2021-11-01
发明人： Mun Ja Kim , Byungchul Yoo , Haeshin Lee , Chang Young Jeong , Yunhan Lee
摘要： An adhesive composition, a method for preparing the same, a reticle assembly including the same, and a method for fabricating the reticle assembly including the same are provided. The adhesive composition includes a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol, and a solvent including water and alcohol.
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公开(公告)号：US20220283962A1
公开(公告)日：2022-09-08
申请号：US17751798
申请日：2022-05-24
发明人： Sangmuk HWANG , Jaegeun Park , Hojun Shim , Byungchul Yoo
摘要： A storage controller includes a command manager and a direct memory access (DMA) engine. The command manager receives a first submission queue doorbell from an external device, fetches a first command including a first latency from the external device in response to the first submission queue doorbell, and determines a first timing to write a first completion into the external device based on the first latency, the first completion indicating that the first command is completely processed. The DMA engine receives a request signal requesting processing of the first command from the command manager, transfer data, which the first command requests, based on a DMA transfer in response to the request signal, and outputs a complete signal, which indicates that the first command is completely processed, to the command manager.
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