-
1.发明授权公开(公告)号：US10087348B2
公开(公告)日：2018-10-02
申请号：US15254701
申请日：2016-09-01
发明人： Byungchul Yoo , Sungyong Cho , Jaehyuck Choi , Jeongsu Yang , Donghoon Chung , Han-Shin Lee , Myungjun Kim , Ikjun Kim , Jikang Kim , Jeonghwan Min , Kyoungchae Seo
IPC分类号： C08F8/44 , C08F220/06 , C09J133/10 , G03F1/64 , G03F1/82 , C09J133/08 , C09J133/06 , C08F6/02 , C09J133/02
摘要： A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.
-
2.发明申请公开(公告)号：US20170088755A1
公开(公告)日：2017-03-30
申请号：US15254701
申请日：2016-09-01
发明人： Byungchul YOO , Sungyong CHO , Jaehyuck CHOI , Jeongsu Yang , Donghoon CHUNG , Han-Shin LEE , Myungjun KIM , Ikjun KIM , Jikang KIM , Jeonghwan MIN , Kyoungchae SEO
IPC分类号： C09J133/10 , G03F1/82 , B08B1/00 , C09J133/06 , B08B3/08 , B08B3/12 , G03F1/64 , C09J133/08
CPC分类号： C09J133/10 , C08F6/02 , C08F8/44 , C08F220/06 , C09J133/02 , C09J133/068 , C09J133/08 , C09J133/26 , G03F1/64 , G03F1/82
摘要： A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.
-
搜索结果
2 条记录 (耗时 0.015 秒)
