公开(公告)号：US10087348B2

公开(公告)日：2018-10-02

申请号：US15254701

申请日：2016-09-01

申请人： Samsung Electronics Co., Ltd. ,  FINE SEMITECH CORP.

发明人： Byungchul Yoo ,  Sungyong Cho ,  Jaehyuck Choi ,  Jeongsu Yang ,  Donghoon Chung ,  Han-Shin Lee ,  Myungjun Kim ,  Ikjun Kim ,  Jikang Kim ,  Jeonghwan Min ,  Kyoungchae Seo

IPC分类号： C08F8/44 ,  C08F220/06 ,  C09J133/10 ,  G03F1/64 ,  G03F1/82 ,  C09J133/08 ,  C09J133/06 ,  C08F6/02 ,  C09J133/02

摘要： A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.