Invention Grant
- Patent Title: Plasma processing method and plasma processing device
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Application No.: US15556455Application Date: 2016-11-02
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Publication No.: US10090162B2Publication Date: 2018-10-02
- Inventor: Junya Tanaka , Tetsuo Ono
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2016-006752 20160118
- International Application: PCT/JP2016/082508 WO 20161102
- International Announcement: WO2017/126184 WO 20170727
- Main IPC: C03C15/00
- IPC: C03C15/00 ; C03C25/68 ; H01L21/3065 ; H01L21/67 ; H01L21/311 ; H01J37/32 ; H01L21/3213

Abstract:
Controllability of ion bombardment on a substrate is further improved to achieve uniformity of the etched substrate across the substrate surface.A plasma processing apparatus performs plasma generation and control of energy of ion bombardment on the substrate independently, generates plasma by continuous discharge or pulse discharge, and switches at least two bias powers having different frequencies, and alternately and repeatedly applies the at least two bias powers having different frequencies to a sample stage while the plasma is being generated.
Public/Granted literature
- US20180047573A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING DEVICE Public/Granted day:2018-02-15
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