- 专利标题: Dicing channels for glass interposers
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申请号: US15010868申请日: 2016-01-29
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公开(公告)号: US10090255B2公开(公告)日: 2018-10-02
- 发明人: Brittany L. Hedrick , Vijay Sukumaran , Christopher L. Tessler , Richard F. Indyk , Sarah H. Knickerbocker
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Michael LeStrange; Andrew M. Calderon
- 主分类号: H05K1/11
- IPC分类号: H05K1/11 ; H05K1/18 ; H05K3/00 ; H01L23/00 ; H01L21/78 ; H01L23/498 ; H01L21/48 ; H05K1/03 ; H01L23/15
摘要:
The present disclosure relates to semiconductor structures and, more particularly, to dicing channels used in the singulatation process of interposers and methods of manufacture. The structure includes: one or more redistribution layers; a glass interposer connected to the one or more redistribution layers; a channel formed through the one or more redistribution layers and the glass interposer core, forming a dicing channel; and polymer material conformally filling the channel.
公开/授权文献
- US20170221837A1 DICING CHANNELS FOR GLASS INTERPOSERS 公开/授权日:2017-08-03
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