Invention Grant
- Patent Title: Dicing channels for glass interposers
-
Application No.: US15010868Application Date: 2016-01-29
-
Publication No.: US10090255B2Publication Date: 2018-10-02
- Inventor: Brittany L. Hedrick , Vijay Sukumaran , Christopher L. Tessler , Richard F. Indyk , Sarah H. Knickerbocker
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: H05K1/11
- IPC: H05K1/11 ; H05K1/18 ; H05K3/00 ; H01L23/00 ; H01L21/78 ; H01L23/498 ; H01L21/48 ; H05K1/03 ; H01L23/15

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to dicing channels used in the singulatation process of interposers and methods of manufacture. The structure includes: one or more redistribution layers; a glass interposer connected to the one or more redistribution layers; a channel formed through the one or more redistribution layers and the glass interposer core, forming a dicing channel; and polymer material conformally filling the channel.
Public/Granted literature
- US20170221837A1 DICING CHANNELS FOR GLASS INTERPOSERS Public/Granted day:2017-08-03
Information query