Invention Grant
- Patent Title: Spacer and manufacturing device for the same
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Application No.: US15944673Application Date: 2018-04-03
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Publication No.: US10095104B2Publication Date: 2018-10-09
- Inventor: Huan Liu , Zui Wang , Jinbo Guo , Shih-hsun Lo
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02F1/1339 ; G03F1/70 ; G03F1/78 ; G03F1/36 ; G03F7/00

Abstract:
A spacer manufacturing device is disclosed. The device includes a photo mask having a central light-transmitting region and a peripheral light-transmitting region disposed at a periphery of the central light-transmitting region; and an exposure device right opposite to the photo mask. Light emitted from the exposure device is irradiated to a negative photoresist material after passing through the photo mask, the light intensity passing through the peripheral light-transmitting region is less than the light intensity passing through the central light-transmitting region. A spacer is also disclosed. Only one exposure process is required to realize the spacer having a convex-shaped cross section. The process is simple and the manufacturing cost is low. At the same time, flatness of the convex shoulder of the spacer having a convex-shaped cross section is adjustable, which can satisfy the requirement for manufacturing spacers having different specifications.
Public/Granted literature
- US20180224739A1 SPACER AND MANUFACTURING DEVICE FOR THE SAME Public/Granted day:2018-08-09
Information query
IPC分类: