Invention Grant
- Patent Title: Gas laser device and condenser
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Application No.: US15290518Application Date: 2016-10-11
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Publication No.: US10096966B2Publication Date: 2018-10-09
- Inventor: Akira Suwa , Kouji Kakizaki , Hiroaki Tsushima , Tomoyuki Ohkubo , Hiroshi Umeda , Hisakazu Katsuumi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2014/067045 20140626
- Main IPC: H01S3/097
- IPC: H01S3/097 ; H01G4/14 ; H01G4/258 ; H01G4/30 ; H01S3/041 ; H01S3/225 ; H01S3/03 ; H01S3/036 ; H01S3/038
Abstract:
A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.
Public/Granted literature
- US20170033527A1 GAS LASER DEVICE AND CONDENSER Public/Granted day:2017-02-02
Information query
