公开(公告)号：US10666008B2

公开(公告)日：2020-05-26

申请号：US16178382

申请日：2018-11-01

申请人： Gigaphoton Inc.

发明人： Natsushi Suzuki ,  Osamu Wakabayashi ,  Hiroaki Tsushima ,  Masanori Yashiro

IPC分类号： H01S3/036 ,  H01S3/104 ,  H01S3/225 ,  B01D53/34 ,  B01D53/82 ,  H01S3/23 ,  B01D53/04 ,  B01D53/68 ,  B01D53/86

摘要： A gas supply system may include a first gas supply line, a second gas supply line, a circulation gas pipe, a gas purification unit, a first valve, and a second valve. The first gas supply line may include a first branching point at which the first gas supply line branches into a first branch connected to a first chamber and a second branch connected to a second chamber and the second gas supply line may include a second branching point at which the second gas supply line branches into a third branch connected to the first chamber and a fourth branch connected to the second chamber. A first portion of the first gas supply line upstream from the first branching point and a second portion of the second gas supply line upstream from the second branching point may be constituted by separate pipes from each other.

公开(公告)号：US10164396B2

公开(公告)日：2018-12-25

申请号：US15720122

申请日：2017-09-29

申请人： GIGAPHOTON INC.

发明人： Akihiko Kurosu ,  Takashi Matsunaga ,  Hiroyuki Masuda ,  Osamu Wakabayashi ,  Hiroaki Tsushima ,  Masanori Yashiro ,  Takeshi Ohta

IPC分类号： H01S3/036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/04 ,  H01S3/03 ,  H01S3/08 ,  H01S3/134 ,  H01S3/13 ,  H01S3/225 ,  H01S3/041

摘要： There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.

公开(公告)号：US09825417B2

公开(公告)日：2017-11-21

申请号：US15144081

申请日：2016-05-02

申请人： GIGAPHOTON INC.

发明人： Akihiko Kurosu ,  Takashi Matsunaga ,  Hiroyuki Masuda ,  Osamu Wakabayashi ,  Hiroaki Tsushima ,  Masanori Yashiro ,  Takeshi Ohta

IPC分类号： H01S3/036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/04 ,  H01S3/03 ,  H01S3/08 ,  H01S3/134 ,  H01S3/13 ,  H01S3/225 ,  H01S3/041

CPC分类号： H01S3/036 ,  H01S3/03 ,  H01S3/0404 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/1306 ,  H01S3/134 ,  H01S3/2258

摘要： There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.

公开(公告)号：US09722385B2

公开(公告)日：2017-08-01

申请号：US15198433

申请日：2016-06-30

申请人： Gigaphoton Inc.

发明人： Hiroyuki Ikeda ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Hisakazu Katsuumi

IPC分类号： H01S3/038 ,  H01S3/097 ,  H01S3/225 ,  H01S3/036 ,  H01S3/03 ,  H01S3/134

CPC分类号： H01S3/038 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/09702 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2258

摘要： A laser chamber for a discharge excited gas laser apparatus may include: a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; a fan configured to flow laser gas between the first discharge electrode and the second discharge electrode; a first insulating member disposed upstream and downstream of a laser gas flow from the first discharge electrode; a metallic damper member disposed upstream of the laser gas flow from the second discharge electrode; and a second insulating member disposed downstream of the laser gas flow from the second discharge electrode.

公开(公告)号：US09331450B2

公开(公告)日：2016-05-03

申请号：US14663086

申请日：2015-03-19

申请人： Gigaphoton Inc.

发明人： Takeshi Asayama ,  Hakaru Mizoguchi ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Osamu Wakabayashi ,  Kazuya Takezawa

IPC分类号： H01S3/097 ,  H01S3/038 ,  H01S3/225 ,  H01S3/034 ,  H01S3/08 ,  H01S3/104 ,  H01S3/036

CPC分类号： H01S3/038 ,  H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/0388 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/104 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

摘要： A laser apparatus according to embodiments may include a laser chamber including a laser gain medium; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber; and a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed.

摘要翻译： 根据实施例的激光装置可以包括包括激光增益介质的激光室; 电源; 从电源施加电压的第一电极和接地的第二电极，第一和第二电极设置在激光室中; 以及连接到所述电源的连接器，并且以允许所述第一电极向所述第二电极设置的一侧移动的方式支撑所述第一电极。

公开(公告)号：US10096966B2

公开(公告)日：2018-10-09

申请号：US15290518

申请日：2016-10-11

申请人： Gigaphoton Inc.

发明人： Akira Suwa ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Tomoyuki Ohkubo ,  Hiroshi Umeda ,  Hisakazu Katsuumi

IPC分类号： H01S3/097 ,  H01G4/14 ,  H01G4/258 ,  H01G4/30 ,  H01S3/041 ,  H01S3/225 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038

摘要： A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.

公开(公告)号：US09853410B2

公开(公告)日：2017-12-26

申请号：US15240162

申请日：2016-08-18

申请人： Gigaphoton Inc.

发明人： Takeshi Asayama ,  Hiroaki Tsushima ,  Kouji Kakizaki ,  Osamu Wakabayashi

IPC分类号： H01S3/038 ,  H01S3/036 ,  H01S3/225 ,  H01S3/00 ,  G03F7/20 ,  H01S3/08 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/134 ,  H01S3/13

CPC分类号： H01S3/038 ,  G03F7/70025 ,  H01S3/0014 ,  H01S3/036 ,  H01S3/08009 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/225

摘要： A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.

公开(公告)号：US09490603B2

公开(公告)日：2016-11-08

申请号：US14638883

申请日：2015-03-04

申请人： GIGAPHOTON INC.

发明人： Hiroaki Tsushima ,  Osamu Wakabayashi ,  Takahito Kumazaki ,  Takashi Matsunaga

IPC分类号： H01S3/00 ,  H01S3/134 ,  G01J11/00 ,  H01S3/034 ,  H01S3/038 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/23 ,  H01S3/10

CPC分类号： H01S3/0014 ,  G01J1/4257 ,  G01J11/00 ,  H01S3/005 ,  H01S3/034 ,  H01S3/038 ,  H01S3/08009 ,  H01S3/0971 ,  H01S3/10069 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2308

摘要： A laser apparatus may comprise: a laser chamber configured to include a laser gain medium; a pair of electrodes disposed in the laser chamber; an energy detector configured to measure pulse energy of laser beams outputted by discharging between the pair of the electrodes; an optical element disposed on a light path of the laser beams; and a controller configured to calculate an integration value of absorption energy at the optical element, and determine whether the integration value exceeds a lifetime integration value of the optical element based on the pulse energy of the laser beams.

摘要翻译： 激光装置可以包括：激光室，被配置为包括激光增益介质; 设置在激光室中的一对电极; 能量检测器，被配置为测量在所述一对电极之间通过放电而输出的激光束的脉冲能量; 设置在激光束的光路上的光学元件; 以及控制器，其被配置为计算所述光学元件处的吸收能的积分值，并且基于所述激光束的脉冲能量来确定所述积分值是否超过所述光学元件的寿命积分值。

公开(公告)号：US09373926B2

公开(公告)日：2016-06-21

申请号：US14694743

申请日：2015-04-23

申请人： GIGAPHOTON INC.

发明人： Hiroaki Tsushima ,  Hakaru Mizoguchi ,  Junichi Fujimoto ,  Hiroaki Nakarai ,  Natsushi Suzuki

IPC分类号： H01S3/036 ,  F16C33/66 ,  F16C32/04 ,  H01S3/134 ,  H01S3/225 ,  H01S3/038 ,  H01S3/097 ,  H01S3/223 ,  H01S3/104 ,  F16C19/06 ,  H01S3/0971 ,  H01S3/1055

CPC分类号： H01S3/036 ,  F16C19/06 ,  F16C32/0402 ,  F16C32/0406 ,  F16C33/6696 ,  F16C2204/02 ,  F16C2204/10 ,  F16C2204/52 ,  F16C2240/40 ,  F16C2360/46 ,  H01S3/038 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/2232 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

摘要： There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.

摘要翻译： 提供了容纳一对放电电极和气体循环功能的激光室，所述激光室包括：支撑所述气体循环风扇的轴的磁性轴承，所述轴与所述磁性轴承不接触; 以及触控轴承，其构造为当所述磁性轴承不受控制时作为轴承进行操作，所述触地轴承设置有由Au镀层，含Ni镀层和Cu镀层中的一种或多种构成的固体润滑剂。

公开(公告)号：US11451003B2

公开(公告)日：2022-09-20

申请号：US17009160

申请日：2020-09-01

申请人： Gigaphoton Inc.

发明人： Hiroaki Tsushima ,  Satoshi Tanaka ,  Yousuke Fujimaki ,  Takeshi Asayama ,  Osamu Wakabayashi

IPC分类号： H01S3/036 ,  G03F7/20 ,  H01S3/225

摘要： A laser gas regenerating apparatus regenerates a discharged gas discharged from at least one ArF excimer laser apparatus and supplies the regenerated gas to the at least one ArF excimer laser apparatus connected to a first laser gas supply source that supplies a first laser gas and to a second laser gas supply source that supplies a second laser gas. The laser gas regenerating apparatus includes a data obtaining unit that obtains data on a supply amount of the second laser gas supplied to the at least one ArF excimer laser apparatus; a xenon adding unit that adds, to the regenerated gas, a third laser gas; and a control unit that controls, based on the supply amount, an addition amount of the third laser gas by the xenon adding unit.