Invention Grant
- Patent Title: High reliability etched-facet photonic devices
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Application No.: US14296180Application Date: 2014-06-04
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Publication No.: US10103518B2Publication Date: 2018-10-16
- Inventor: Alex A. Behfar
- Applicant: MACOM Technology Solutions Holdings, Inc.
- Applicant Address: US MA Lowell
- Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
- Current Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
- Current Assignee Address: US MA Lowell
- Agency: Wilmer Cutler Pickering Hale and Dorr LLP
- Main IPC: H01S5/028
- IPC: H01S5/028 ; H01S5/323 ; H01S5/22 ; G02F1/17 ; H01S5/02 ; H01S5/16 ; H01S5/00
Abstract:
Semiconductor photonic device surfaces are covered with a dielectric or a metal protective layer. The protective layer covers the entire device, including regions near facets at active regions, to prevent bare or unprotected semiconductor regions, thereby to form a very high reliability etched facet photonic device.
Public/Granted literature
- US20140286368A1 HIGH RELIABILITY ETCHED-FACET PHOTONIC DEVICES Public/Granted day:2014-09-25
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