- 专利标题: Ion beam sample preparation apparatus and methods
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申请号: US13949369申请日: 2013-07-24
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公开(公告)号: US10110854B2公开(公告)日: 2018-10-23
- 发明人: John Andrew Hunt , Steven Thomas Coyle , Michael Patrick Hassel-Shearer
- 申请人: Gatan, Inc.
- 申请人地址: US CA Pleasonton
- 专利权人: Gatan, Inc.
- 当前专利权人: Gatan, Inc.
- 当前专利权人地址: US CA Pleasonton
- 代理机构: Snyder, Clark, Lesch, & Chung, LLP
- 主分类号: H04N7/18
- IPC分类号: H04N7/18 ; H01J5/02 ; H01J37/08 ; H01J37/30 ; H05B6/00 ; G01N23/00 ; G01N21/88 ; G01N1/32 ; H01L21/66 ; G02B21/00 ; H01J37/305 ; G01N23/2251 ; G01N21/01 ; G01N21/84
摘要:
Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues.
公开/授权文献
- US20140028828A1 Ion Beam Sample Preparation Apparatus and Methods 公开/授权日:2014-01-30
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