- 专利标题: Select transistors with tight threshold voltage in 3D memory
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申请号: US15906317申请日: 2018-02-27
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公开(公告)号: US10128257B2公开(公告)日: 2018-11-13
- 发明人: Liang Pang , Jayavel Pachamuthu , Yingda Dong
- 申请人: SanDisk Technologies LLC
- 申请人地址: US TX Addison
- 专利权人: SanDisk Technologies LLC
- 当前专利权人: SanDisk Technologies LLC
- 当前专利权人地址: US TX Addison
- 代理机构: Vierra Magen Marcus LLP
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L27/11519 ; H01L21/02 ; H01L21/28 ; H01L27/11524 ; H01L27/11556 ; H01L27/11565 ; H01L27/1157 ; H01L27/11582 ; H01L29/66 ; H01L27/1158 ; H01L27/11553
摘要:
Disclosed herein is a 3D memory with a select transistor, and method for fabricating the same. The select transistor may have a conductive floating gate, a conductive control gate, a first dielectric between the conductive floating gate and the conductive control gate, and a second dielectric between a body and the conductive floating gate. In one aspect, a uniform gate dielectric is formed using lateral epitaxial growth in a recess adjacent a crystalline semiconductor select transistor body, followed by forming the gate dielectric from the epitaxial growth. Techniques help to prevent, or at least reduce, a leakage current between the select transistor control gate and the select transistor body and/or the semiconductor substrate below the select transistor. Therefore, select transistors having a substantially uniform threshold voltage, on current, and S-factor are achieved. Also, select transistors have a high on-current and a steep sub-threshold slope.
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