- Patent Title: Methods of removing particles from over semiconductor substrates
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Application No.: US14605218Application Date: 2015-01-26
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Publication No.: US10137481B2Publication Date: 2018-11-27
- Inventor: Joseph Neil Greeley , Dan Millward , Wayne Huang
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: B08B3/00
- IPC: B08B3/00 ; B08B3/10 ; H01L21/02 ; H01L21/67 ; B08B3/12

Abstract:
Some embodiments include methods of removing particles from over surfaces of semiconductor substrates. Liquid may be flowed across the surfaces and the particles. While the liquid is flowing, electrophoresis and/or electroosmosis may be utilized to enhance transport of the particles from the surfaces and into the liquid. In some embodiments, temperature, pH and/or ionic strength within the liquid may be altered to assist in the removal of the particles from over the surfaces of the substrates.
Public/Granted literature
- US20150128992A1 Methods of Removing Particles from Over Semiconductor Substrates Public/Granted day:2015-05-14
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