Invention Grant
- Patent Title: Semiconductor manufacturing apparatus having a pickup unit simultaneously picking up a plurality of semiconductor chips
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Application No.: US15600082Application Date: 2017-05-19
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Publication No.: US10157760B2Publication Date: 2018-12-18
- Inventor: Minoru Kai
- Applicant: J-DEVICES CORPORATION
- Applicant Address: JP Usuki, Oita
- Assignee: J-DEVICES CORPORATION
- Current Assignee: J-DEVICES CORPORATION
- Current Assignee Address: JP Usuki, Oita
- Agency: Hauptman Ham, LLP
- Priority: JP2016-102481 20160523
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/67 ; H01L23/14 ; H01L23/498 ; H01L23/00 ; H01L21/683

Abstract:
A semiconductor manufacturing apparatus comprises a stage connected to a vacuum generator to suction a semiconductor wafer including a plurality of semiconductor chips, a suction control unit connected to a connecting portion of the stage and the vacuum generator to control the connection of the stage and the vacuum generator, a pickup unit connected to a movement control unit simultaneously picking up the plurality of semiconductor chips, and a control unit controlling movement and rotation of the pickup unit and controlling the suction control unit, the control unit is connected to the movement control unit. The pickup unit converts an interval of the plurality of semiconductor chips to a predetermined pitch and holds the pitch. The pickup unit moves the plurality of semiconductor chips from the stage to mounting positions of a supporting substrate and simultaneously adheres the plurality of semiconductor chips at the mounting positions by the control unit.
Public/Granted literature
- US20170338136A1 SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD Public/Granted day:2017-11-23
Information query
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