Invention Grant
- Patent Title: Systems and methods for electrically testing electromigration in an electromigration test structure
-
Application No.: US15181909Application Date: 2016-06-14
-
Publication No.: US10161994B2Publication Date: 2018-12-25
- Inventor: Timothy Allen McMullen , Brent Dale Harry , Eric James Wilcox , James J. Donlin
- Applicant: Cascade Microtech, Inc.
- Applicant Address: US OR Beaverton
- Assignee: FormFactor Beaverton, Inc.
- Current Assignee: FormFactor Beaverton, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems also include a voltage detector, and a controller. In some embodiments of the methods, a voltage control portion regulates a high-side signal electric current to maintain a voltage difference below a voltage setpoint while a current control portion maintains the high-side signal electric current below a threshold current value. In some embodiments of the methods, one of the voltage difference and a magnitude of the high-side signal electric current is selected as a primary control parameter while the other is selected as a compliant control parameter.
Public/Granted literature
- US20170356957A1 SYSTEMS AND METHODS FOR ELECTRICALLY TESTING ELECTROMIGRATION IN AN ELECTROMIGRATION TEST STRUCTURE Public/Granted day:2017-12-14
Information query