Invention Grant
- Patent Title: Method for manufacturing an integrated magnetoresistive sensor, in particular a three-axis magnetoresistive sensor
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Application No.: US14938121Application Date: 2015-11-11
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Publication No.: US10177306B2Publication Date: 2019-01-08
- Inventor: Dario Paci , Marco Morelli , Caterina Riva
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: ITTO2010A1050 20101223
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00 ; H01L43/12 ; G01R33/00 ; G01R33/09 ; H01L43/08 ; H01L27/22

Abstract:
An integrated magnetoresistive device includes a substrate of semiconductor material that is covered, on a first surface, by an insulating layer. A magnetoresistor of ferromagnetic material extends within the insulating layer and defines a sensitivity plane of the sensor. A concentrator of ferromagnetic material includes at least one arm that extends in a transversal direction to the sensitivity plane and is vertically offset from the magnetoresistor. The concentrator concentrates deflects magnetic flux lines perpendicular to the sensitivity plane so as to generate magnetic-field components directed in a parallel direction to the sensitivity plane.
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