- 专利标题： Method to package multiple mems sensors and actuators at different gases and cavity pressures
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申请号： US14887622申请日： 2015-10-20
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公开(公告)号： US10183860B2公开(公告)日： 2019-01-22
- 发明人: Wenhua Zhang , Shingo Yoneoka
- 申请人： mCube Inc.
- 申请人地址： US CA San Jose
- 专利权人： mCube Inc.
- 当前专利权人： mCube Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： Kilpatrick Townsend and Stockton LLP
- 主分类号： B81B7/02
- IPC分类号： B81B7/02 ; B81C1/00 ; B81B7/00 ; H01L21/56 ; H01L41/113
摘要：
A method for fabricating a multiple MEMS device includes providing a semiconductor substrate having a first and second MEMS device, and an encapsulation wafer with a first cavity and a second cavity, which includes at least one channel. The first MEMS is encapsulated within the first cavity and the second MEMS device is encapsulated within the second cavity. These devices is encapsulated within a first encapsulation environment at a first air pressure, and encapsulating the first MEMS device within the first cavity at the first air pressure. The second MEMS device within the second cavity is then subjected to a second encapsulating environment at a second air pressure via the channel of the second cavity.
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