Invention Grant
- Patent Title: Methods of manufacturing a color image sensor having an array of pixels with color filters
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Application No.: US15839292Application Date: 2017-12-12
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Publication No.: US10199413B2Publication Date: 2019-02-05
- Inventor: Axel Crocherie , Jean-Pierre Oddou , Stéphane Allegret-Maret , Hugues Leininger
- Applicant: STMicroelectronics (Crolles 2) SAS , STMicroelectronics SA
- Applicant Address: FR Montrouge FR Crolles
- Assignee: STMICROELECTRONICS SA,STMICROELECTRONICS(CROLLES 2) SAS
- Current Assignee: STMICROELECTRONICS SA,STMICROELECTRONICS(CROLLES 2) SAS
- Current Assignee Address: FR Montrouge FR Crolles
- Agency: Slater Matsil, LLP
- Priority: FR1551035 20150210
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L27/146

Abstract:
A color image sensor including an array of pixels is formed in a semiconductor layer having a back side that receives an illumination. Insulated conductive walls penetrate into the semiconductor layer from the back side and separate the pixels from one another. For each pixel, a color pixel penetrates into from 5 to 30% of a thickness of the semiconductor layer from the back side and occupies at least 90% of the surface area delimited by the walls. An electrically-conductive layer extends from the lateral wall of the filter all the way to the walls.
Public/Granted literature
- US20180102387A1 COLOR IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-04-12
Information query
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