Invention Grant
- Patent Title: Semiconductor device with a guard structure and corresponding methods of manufacture
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Application No.: US15915890Application Date: 2018-03-08
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Publication No.: US10199490B2Publication Date: 2019-02-05
- Inventor: Adrian Finney , Radu Eugen Cazimirovici , Dietmar Kotz , Thomas Ostermann
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102016111836 20160628
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/08 ; H01L21/82 ; H01L21/263 ; H01L21/8234 ; H01L27/088 ; H01L29/06 ; H01L29/10 ; H01L29/36 ; H01L29/66

Abstract:
A semiconductor device includes a guard structure located laterally between a first active area of a semiconductor substrate and a second active area of the semiconductor substrate. The guard structure includes a first doping region located at a front side surface of the semiconductor substrate, and a wiring structure electrically connecting the first doping region to a highly doped portion of a common doping region. The common doping region extends from a backside surface of the semiconductor substrate to at least a part of the front side surface of the semiconductor substrate in contact with the wiring structure of the guard structure. Corresponding methods for forming the semiconductor device are also described.
Public/Granted literature
- US20180197982A1 Semiconductor Device with a Guard Structure and Corresponding Methods of Manufacture Public/Granted day:2018-07-12
Information query
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