Invention Grant
- Patent Title: Piezoelectric film, piezoelectric film element, piezoelectric actuator, piezoelectric sensor, hard-disk drive and ink jet printer head
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Application No.: US15280469Application Date: 2016-09-29
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Publication No.: US10199557B2Publication Date: 2019-02-05
- Inventor: Yuiko Hirose , Shirou Ootsuki
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-196364 20151002
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/187 ; B41J2/14 ; H01L41/09 ; H01L41/113 ; H01L41/316

Abstract:
A piezoelectric film containing (K,Na)NbO3 as the main component, wherein, when a surface of the piezoelectric film was observed in a field view within a specified range, a plurality of first crystals and a plurality of second crystals are arranged in the surface of the piezoelectric film, wherein, the first crystal has a slender shape orientating toward the first orientation along the surface, and the second crystal has a slender shape orientating toward the second orientation which crosses with the first orientation along the surface.
Public/Granted literature
Information query
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