公开(公告)号：US12096695B2

公开(公告)日：2024-09-17

申请号：US17213573

申请日：2021-03-26

Applicant: TDK CORPORATION

Inventor： Yuiko Hirose ,  Hiroki Katoh ,  Yumi Akiyama

IPC: H10N30/50 ,  H10N30/045 ,  H10N30/053 ,  H10N30/20 ,  H10N30/40 ,  H10N30/853 ,  H10N30/87

CPC classification number: H10N30/50 ,  H10N30/045 ,  H10N30/053 ,  H10N30/20 ,  H10N30/40 ,  H10N30/8542 ,  H10N30/8554 ,  H10N30/871 ,  H10N30/877

Abstract: Provided is a piezoelectric element according to the invention including a stacked body in which a piezoelectric layer and an internal electrode layer are stacked. In addition, the internal electrode layer contains at least one kind of element selected from palladium, nickel, platinum, gold, and silver, and copper, and the content of copper contained in the internal electrode layer is 1 to 50 at % in terms of a copper element.

公开(公告)号：US11005028B2

公开(公告)日：2021-05-11

申请号：US16357864

申请日：2019-03-19

Applicant: TDK CORPORATION

Inventor： Hiroki Katoh ,  Yuiko Hirose ,  Masakazu Hirose ,  Mirai Ishida

IPC: H01L41/187 ,  H01L41/43 ,  C04B35/495 ,  C04B35/63

Abstract: A piezoelectric composition including copper, germanium and a complex oxide represented by a compositional formula KmNbO3 and having a perovskite structure, in which m in the compositional formula satisfies 0.970≤m≤0.999, and with respect to 1 mol of the complex oxide, x mol % of copper in terms of a copper element and y mol % of germanium in terms of a germanium element are contained, wherein x satisfies 0.100≤x≤1.000 and y satisfies 0.000

公开(公告)号：US11195986B2

公开(公告)日：2021-12-07

申请号：US16496987

申请日：2018-03-20

Applicant: TDK CORPORATION

Inventor： Yuiko Hirose ,  Hiroki Katoh ,  Masakazu Hirose

IPC: H01L41/187 ,  C04B35/495

Abstract: A piezoelectric composition having a complex oxide including potassium and niobium, in which the complex oxide has a first phase represented by a compositional formula KNbO3, and one or two phases selected from a second phase represented by a compositional formula K4Nb6O17 and a third phase represented by a compositional formula KNb3O8.

公开(公告)号：US09614463B2

公开(公告)日：2017-04-04

申请号：US14176741

申请日：2014-02-10

Applicant: TDK CORPORATION

Inventor： Yuiko Hirose ,  Yasuhiro Aida

IPC: H01L41/04 ,  H02N2/00 ,  H01L41/187 ,  B06B1/02 ,  H02N2/14 ,  H01L41/09

CPC classification number: H02N2/0075 ,  B06B1/0253 ,  B06B2201/55 ,  H01L41/042 ,  H01L41/0973 ,  H01L41/1873 ,  H02N2/14

Abstract: A piezoelectric device is provided with a piezoelectric element including a piezoelectric layer exhibiting a polarizability γ smaller than 1×10−9 (C/(V·m)) in the case where an electric field is applied until polarization is saturated and a circuit having a means to set a minimum value of a drive electric field to become larger than a positive coercive electric field of the above-described piezoelectric layer and a means to set a maximum value of the above-described drive electric field to become smaller than (Pm′(maximum value of polarization)−Pr′(quasi-remanent polarization))/(1×10−9) and, therefore, an object is to drive the piezoelectric element in an electric field range in which maximum piezoelectric characteristics are obtained, improve the characteristics of the piezoelectric device, and enhance the reliability.

公开(公告)号：US12232421B2

公开(公告)日：2025-02-18

申请号：US17203459

申请日：2021-03-16

Applicant: TDK CORPORATION

Inventor： Masakazu Hirose ,  Yuiko Hirose

IPC: H01L41/083 ,  H01L41/047 ,  H01L41/187 ,  H01L41/297 ,  H01L41/43 ,  H10N30/067 ,  H10N30/097 ,  H10N30/50 ,  H10N30/853 ,  H10N30/87

Abstract: A piezoelectric composition according to the present invention comprising: a carbon, and a main component composed of an alkali metal niobate based compound. The amount of carbon contained is 350 to 700 ppm by weight.

公开(公告)号：US10199557B2

公开(公告)日：2019-02-05

申请号：US15280469

申请日：2016-09-29

Applicant: TDK CORPORATION

Inventor： Yuiko Hirose ,  Shirou Ootsuki

IPC: H01L41/08 ,  H01L41/187 ,  B41J2/14 ,  H01L41/09 ,  H01L41/113 ,  H01L41/316

Abstract: A piezoelectric film containing (K,Na)NbO3 as the main component, wherein, when a surface of the piezoelectric film was observed in a field view within a specified range, a plurality of first crystals and a plurality of second crystals are arranged in the surface of the piezoelectric film, wherein, the first crystal has a slender shape orientating toward the first orientation along the surface, and the second crystal has a slender shape orientating toward the second orientation which crosses with the first orientation along the surface.

公开(公告)号：US11659769B2

公开(公告)日：2023-05-23

申请号：US16497052

申请日：2018-03-20

Applicant: TDK CORPORATION

Inventor： Masakazu Hirose ,  Yuiko Hirose ,  Hiroki Katoh

IPC: H01L41/187

CPC classification number: H10N30/8542 ,  H10N30/072 ,  H10N30/50 ,  H10N30/097

Abstract: A piezoelectric composition including manganese and a complex oxide having a perovskite structure represented by a general formula ABO3, wherein an A site element in the ABO3 is potassium or potassium and sodium, a B site element in the ABO3 is niobium, a concentration distribution of the manganese has a variation, and the variation shows a CV value of 35% or more and 440% or less.

公开(公告)号：US11271147B2

公开(公告)日：2022-03-08

申请号：US17040310

申请日：2019-03-19

Applicant: TDK CORPORATION

Inventor： Masakazu Hirose ,  Yuiko Hirose ,  Hiroki Katoh ,  Tamotsu Sasaki ,  Yuji Umeda

IPC: H01L41/187 ,  C04B35/495

Abstract: A piezoelectric composition containing: a complex oxide having a perovskite structure represented by a general formula of ABO3; copper; and one or more elements selected from the group consisting of chromium, nickel and zinc, in which in ABO3, an A-site element is potassium and a B-site element is niobium, or niobium and tantalum, with respect to 1 mol of the complex oxide, a content ratio of the copper is α mol % in terms of CuO, a content ratio of one or more elements selected from the group consisting of chromium, nickel and zinc is β mol % in terms of CrO3/2, NiO, ZnO, α satisfies a relationship of 0.2≤α≤2.5, and β satisfies a relationship of 0.2≤β≤2.0.

公开(公告)号：US11239410B2

公开(公告)日：2022-02-01

申请号：US16497090

申请日：2018-03-20

Applicant: TDK CORPORATION

Inventor： Hiroki Katoh ,  Yuiko Hirose ,  Masakazu Hirose

IPC: H01L41/187 ,  C04B35/495 ,  H01L41/083

Abstract: A piezoelectric composition including copper and a complex oxide having a perovskite structure represented by a general formula ABO3, in which an A site element in the ABO3 is potassium or potassium and sodium, a B site element in the ABO3 is niobium or niobium and tantalum, the copper is included in n mol % in terms of a copper element with respect to 1 mol of the complex oxide, and n satisfies 0.100≤n≤1.000.

公开(公告)号：US09837596B2

公开(公告)日：2017-12-05

申请号：US14304460

申请日：2014-06-13

Applicant: TDK CORPORATION

Inventor： Ryu Ohta ,  Hitoshi Sakuma ,  Yuiko Hirose

IPC: H01L41/18 ,  H01L41/08 ,  H01L41/187 ,  H01L41/09 ,  H01L41/316

CPC classification number: H01L41/0805 ,  H01L41/0973 ,  H01L41/1873 ,  H01L41/316

Abstract: A piezoelectric element exhibiting a small leakage current density and high reliability as compared with a KNN thin film piezoelectric element in the related art is provided. The piezoelectric element is characterized by including a lower electrode, a piezoelectric layer primarily made from potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, and an upper electrode, wherein the piezoelectric layer is present between the lower electrode and the upper electrode, and the piezoelectric layer has the value determined by dividing the maximum value of intensity of a diffraction peak, where the angle of 2θ is within the range of 21.1°≦2θ≦23.4° in the X-ray diffraction pattern (2θ/θ), by the intensity of a diffraction peak, where 2θ is within the range of 30.1°≦2θ≦33.3°, of 0.04 or less.