Optical measurement of thin films
Abstract:
Embodiments of measurement apparatus for measuring the optical properties of a sample film are described. The measurement apparatus includes a first stage, a second stage, and an arm structure coupled to the second stage. The first stage includes an optical source and a block of transparent material. The block of transparent material includes a surface that supports a sample film. The second stage includes a plurality of layers and an optical detector. The arm structure is designed to translate the second stage with respect to the first stage.
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