Invention Grant
- Patent Title: Optical measurement of thin films
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Application No.: US15862954Application Date: 2018-01-05
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Publication No.: US10209129B2Publication Date: 2019-02-19
- Inventor: Amanda Carpenter , Robert Wilson , Ernest C. Lee , Alexander Puski
- Applicant: Nanosys, Inc.
- Applicant Address: US CA Milpitas
- Assignee: Nanosys, Inc.
- Current Assignee: Nanosys, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J9/02 ; G01J3/443

Abstract:
Embodiments of measurement apparatus for measuring the optical properties of a sample film are described. The measurement apparatus includes a first stage, a second stage, and an arm structure coupled to the second stage. The first stage includes an optical source and a block of transparent material. The block of transparent material includes a surface that supports a sample film. The second stage includes a plurality of layers and an optical detector. The arm structure is designed to translate the second stage with respect to the first stage.
Public/Granted literature
- US20180195901A1 Optical Measurement of Thin Films Public/Granted day:2018-07-12
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