Invention Grant
- Patent Title: Z-axis microelectromechanical detection structure with reduced drifts
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Application No.: US14858563Application Date: 2015-09-18
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Publication No.: US10209269B2Publication Date: 2019-02-19
- Inventor: Alessandro Tocchio
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITTO2014A1029 20141211
- Main IPC: G01P15/02
- IPC: G01P15/02 ; G01P15/125 ; G01C19/5712 ; B81B7/00 ; G01P15/08

Abstract:
Described herein is a microelectromechanical detection structure, provided with: a substrate having a top surface extending in a plane; a detection-electrode arrangement; an inertial mass, suspended above the substrate and the detection-electrode arrangement; and elastic elements, coupling the inertial mass to a central anchorage element fixed with respect to the substrate, in such a way that it is free to rotate about an axis of rotation as a function of a quantity to be detected along a vertical axis, the central anchorage element being arranged at the axis of rotation. A suspension structure is coupled to the detection-electrode arrangement for supporting it, suspended above the substrate and underneath the inertial mass, and is anchored to the substrate via at least one first anchorage region; the fixed-electrode arrangement is anchored to the suspension structure via at least one second anchorage region.
Public/Granted literature
- US20160169931A1 Z-AXIS MICROELECTROMECHANICAL DETECTION STRUCTURE WITH REDUCED DRIFTS Public/Granted day:2016-06-16
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