Invention Grant
- Patent Title: Photoresist composition
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Application No.: US15591266Application Date: 2017-05-10
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Publication No.: US10209618B2Publication Date: 2019-02-19
- Inventor: Tatsuro Masuyama , Koji Ichikawa
- Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2016-097197 20160513; JP2016-097198 20160513
- Main IPC: G03F7/16
- IPC: G03F7/16 ; G03F7/20 ; G03F7/32 ; G03F7/38 ; G03F7/004 ; G03F7/038 ; G03F7/039

Abstract:
A photoresist composition comprising an acid generator and a resin which comprises a structural unit having an acid-liable group, the acid generator generating an acid (I) or an acid (II): the acid (I) showing a hydrogen bonding parameter in the range of 12 (MPa)1/2 to 15 (MPa)1/2 and a polarity parameter in the range of 15 (MPa)1/2 or more; the acid (II) showing a hydrogen bonding parameter in the range of 12 (MPa)1/2 to 15 (MPa)1/2, and a distance of Hansen solubility parameters between the acid (II) and γ-butyrolactone being 7.5 or less, and the distance being calculated from formula (1): R=(4×(δdA−18)2+(δpA−16.6)2+(δhA−7.4)2)1/2 (1) in which δdA represents a dispersion parameter of an acid, δpA represents a polarity parameter of an acid, δhA represents a hydrogen bonding parameter of an acid, and R represents a distance of Hansen solubility parameters between an acid and γ-butyrolactone.
Public/Granted literature
- US20170329219A1 PHOTORESIST COMPOSITION Public/Granted day:2017-11-16
Information query
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