Invention Grant
- Patent Title: Vertical ferroelectric memory device and a method for manufacturing thereof
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Application No.: US14998227Application Date: 2015-12-23
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Publication No.: US10211223B2Publication Date: 2019-02-19
- Inventor: Jan Van Houdt , Pieter Blomme
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: G11C11/22
- IPC: G11C11/22 ; H01L21/28 ; H01L29/51 ; H01L29/66 ; H01L29/78 ; H01L27/1159 ; H01L27/11597

Abstract:
The disclosed technology generally relates to semiconductor devices, and more particularly to a ferroelectric memory device and a method of manufacturing and using the same. In one aspect, a vertical ferroelectric memory device includes a stack of horizontal layers formed on a semiconductor substrate, where the stack of layers includes a plurality gate electrode layers alternating with a plurality of insulating layers. A vertical structure extends vertically through the stack of horizontal layers, where the vertical structure has a vertical channel structure and a sidewall having formed thereon a vertical transition metal oxide (TMO) ferroelectric layer. A memory cell is formed at each of overlapping regions between the gate electrode layers and the vertical channel structure.
Public/Granted literature
- US20160181259A1 Vertical ferroelectric memory device and a method for manufacturing thereof Public/Granted day:2016-06-23
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