- 专利标题: Micromechanical structure for an acceleration sensor
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申请号: US15119010申请日: 2014-12-22
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公开(公告)号: US10215772B2公开(公告)日: 2019-02-26
- 发明人: Johannes Classen
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Norton Rose Fulbright US LLP
- 代理商 Gerard Messina
- 优先权: DE102014202819 20140217
- 国际申请: PCT/EP2014/079004 WO 20141222
- 国际公布: WO2015/120940 WO 20150820
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P15/08
摘要:
A micromechanical structure for an acceleration sensor, including a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor, spring elements that are fastened on the seismic mass and on at least one fastening element, a rotational motion of the seismic mass being generatable by way of the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis.
公开/授权文献
- US20170052207A1 MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR 公开/授权日:2017-02-23
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