- 专利标题: Embedded features for interlocks using additive manufacturing
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申请号: US15894436申请日: 2018-02-12
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公开(公告)号: US10217654B1公开(公告)日: 2019-02-26
- 发明人: Craig R. Chaney , Adam M. McLaughlin
- 申请人: Varian Semiconductor Equipment Associates, Inc.
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 代理机构: Nields, Lemack & Frame, LLC
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/00 ; C23C14/48 ; G08B21/18 ; H01J37/317 ; B33Y80/00
摘要:
The present disclosure describes a method and apparatus for determining whether components in a semiconductor manufacturing system are authorized for use in that system. By embedding an identification feature in the component, it is possible for a controller to determine whether that component is qualified for use in the system. Upon detection of an unauthorized component, the system may alert the user or, in certain embodiments, stop operating of the system. This identification feature is embedded in a component by using an additive manufacturing process that allows the identification feature to be embedded in the component without subjecting the identification feature to extreme temperatures.
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