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公开(公告)号：US10418223B1
公开(公告)日：2019-09-17
申请号：US15941163
申请日：2018-03-30
摘要： A foil liner comprising a plurality of foil layers is disclosed. The foil layers may each be an electrically conductive material that are stacked on top of each other. The spacing between adjacent foil layers may create a thermal gradient such that the temperature of the plasma is hotter than the temperature of the ion source chamber. In other embodiments, the foil layers may be assembly to sink the heat from the plasma so that the plasma is cooler than the temperature of the ion source chamber. In some embodiments, gaps or protrusions are disposed on one or more of the foil layers to affect the thermal gradient. In certain embodiments, one or more of the foil layers may be constructed of an insulating material to further affect the thermal gradient. The foil liner may be easily assembled, installed and replaced from within the ion source chamber.
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公开(公告)号：US10672634B2
公开(公告)日：2020-06-02
申请号：US16244623
申请日：2019-01-10
摘要： The present disclosure describes a method and apparatus for determining whether components in a semiconductor manufacturing system are authorized for use in that system. By embedding an identification feature in the component, it is possible for a controller to determine whether that component is qualified for use in the system. Upon detection of an unauthorized component, the system may alert the user or, in certain embodiments, stop operating of the system. This identification feature is embedded in a component by using an additive manufacturing process that allows the identification feature to be embedded in the component without subjecting the identification feature to extreme temperatures.
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公开(公告)号：US20170140956A1
公开(公告)日：2017-05-18
申请号：US14940214
申请日：2015-11-13
发明人： Adam M. McLaughlin , Jordan B. Tye
IPC分类号： H01L21/67 , B28B1/00 , B28B23/00 , H01L21/683
CPC分类号： H01L21/67103 , B22F3/008 , B22F3/1035 , B28B1/001 , B28B1/008 , B28B7/164 , B33Y80/00 , C22C29/00 , C22C32/00 , H01L21/67109 , H01L21/6833
摘要： A single piece ceramic platen is disclosed. This platen may be manufactured using additive manufacturing. The single piece ceramic platen may be manufactured using additive manufacturing processes. As such, the single piece ceramic platen may include a plurality of embedded features. Electrodes, cooling channels, heating elements, temperature sensors, strain gauges and back side gas channels may each be embedded in the electrode. Incorporation of cooling channels and heating elements allows the platen to operate over a wider range of temperatures. Further, these features may be disposed on a plurality of different depths following a planar or non-planar pathway. For example, the heating elements may be configured such that heating element in one region of the platen, such as an outer edge, are disposed closer to the top surface of the platen.
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公开(公告)号：US20190139742A1
公开(公告)日：2019-05-09
申请号：US15803334
申请日：2017-11-03
IPC分类号： H01J37/317 , G05B13/02 , H01J27/20 , H01J37/075 , H01L21/265 , H01L21/425
摘要： A system that utilizes a component that controls thermal gradients and the flow of thermal energy by variation in density is disclosed. Methods of fabricating the component are also disclosed. The component is manufactured using additive manufacturing. In this way, the density of different regions of the component can be customized as desired. For example, a lattice pattern may be created in the interior of a region of the component to reduce the amount of material used. This reduces weight and also decreases the thermal conduction of that region. By using low density regions and high density regions, the flow of thermal energy can be controlled to accommodate the design constraints.
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公开(公告)号：US10892136B2
公开(公告)日：2021-01-12
申请号：US16101822
申请日：2018-08-13
摘要： A system for reducing clogging and deposition of feed gas on a gas tube entering an ion source chamber is disclosed. To lower the overall temperature of the gas tube, a gas bushing, made of a thermally isolating material, is disposed between the ion source chamber and the gas tube. The gas bushing is made of a thermally isolating material, such as titanium, quartz, boron nitride, zirconia or ceramic. The gas bushing has an inner channel in fluid communication with the ion source chamber and the gas tube to allow the flow of feed gas to the ion source chamber. The gas bushing may have a shape that is symmetrical, allowing it to be flipped to extend its useful life. In some embodiments, the gas tube may be in communication with a heat sink to maintain its temperature.
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公开(公告)号：US20190304738A1
公开(公告)日：2019-10-03
申请号：US15941163
申请日：2018-03-30
IPC分类号： H01J37/08 , H01J27/02 , H01J27/20 , H01J37/317 , C23C14/48
摘要： A foil liner comprising a plurality of foil layers is disclosed. The foil layers may each be an electrically conductive material that are stacked on top of each other. The spacing between adjacent foil layers may create a thermal gradient such that the temperature of the plasma is hotter than the temperature of the ion source chamber. In other embodiments, the foil layers may be assembly to sink the heat from the plasma so that the plasma is cooler than the temperature of the ion source chamber. In some embodiments, gaps or protrusions are disposed on one or more of the foil layers to affect the thermal gradient. In certain embodiments, one or more of the foil layers may be constructed of an insulating material to further affect the thermal gradient. The foil liner may be easily assembled, installed and replaced from within the ion source chamber.
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公开(公告)号：US10217654B1
公开(公告)日：2019-02-26
申请号：US15894436
申请日：2018-02-12
摘要： The present disclosure describes a method and apparatus for determining whether components in a semiconductor manufacturing system are authorized for use in that system. By embedding an identification feature in the component, it is possible for a controller to determine whether that component is qualified for use in the system. Upon detection of an unauthorized component, the system may alert the user or, in certain embodiments, stop operating of the system. This identification feature is embedded in a component by using an additive manufacturing process that allows the identification feature to be embedded in the component without subjecting the identification feature to extreme temperatures.
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公开(公告)号：US20200051773A1
公开(公告)日：2020-02-13
申请号：US16101822
申请日：2018-08-13
摘要： A system for reducing clogging and deposition of feed gas on a gas tube entering an ion source chamber is disclosed. To lower the overall temperature of the gas tube, a gas bushing, made of a thermally isolating material, is disposed between the ion source chamber and the gas tube. The gas bushing is made of a thermally isolating material, such as titanium, quartz, boron nitride, zirconia or ceramic. The gas bushing has an inner channel in fluid communication with the ion source chamber and the gas tube to allow the flow of feed gas to the ion source chamber. The gas bushing may have a shape that is symmetrical, allowing it to be flipped to extend its useful life. In some embodiments, the gas tube may be in communication with a heat sink to maintain its temperature.
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公开(公告)号：US10535499B2
公开(公告)日：2020-01-14
申请号：US15803334
申请日：2017-11-03
IPC分类号： H01J37/00 , H01J37/317 , G05B13/02 , H01L21/425 , H01J37/075 , H01L21/265 , H01J27/20
摘要： A system that utilizes a component that controls thermal gradients and the flow of thermal energy by variation in density is disclosed. Methods of fabricating the component are also disclosed. The component is manufactured using additive manufacturing. In this way, the density of different regions of the component can be customized as desired. For example, a lattice pattern may be created in the interior of a region of the component to reduce the amount of material used. This reduces weight and also decreases the thermal conduction of that region. By using low density regions and high density regions, the flow of thermal energy can be controlled to accommodate the design constraints.
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公开(公告)号：US20190252226A1
公开(公告)日：2019-08-15
申请号：US16244623
申请日：2019-01-10
IPC分类号： H01L21/67 , H01J37/317 , C23C14/48 , G08B21/18
摘要： The present disclosure describes a method and apparatus for determining whether components in a semiconductor manufacturing system are authorized for use in that system. By embedding an identification feature in the component, it is possible for a controller to determine whether that component is qualified for use in the system. Upon detection of an unauthorized component, the system may alert the user or, in certain embodiments, stop operating of the system. This identification feature is embedded in a component by using an additive manufacturing process that allows the identification feature to be embedded in the component without subjecting the identification feature to extreme temperatures.
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