Invention Grant
- Patent Title: Thickened stress relief and power distribution layer
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Application No.: US15274175Application Date: 2016-09-23
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Publication No.: US10229879B2Publication Date: 2019-03-12
- Inventor: Kevin J. Fischer , Christopher M. Pelto , Andrew W. Yeoh
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L23/528

Abstract:
An embodiment includes a semiconductor structure comprising: a frontend portion including a device layer; a backend portion including a bottom metal layer, a top metal layer, and intermediate metal layers between the bottom and top metal layers; wherein (a) the top metal layer includes a first thickness that is orthogonal to the horizontal plane in which the top metal layer lies, the bottom metal layer includes a second thickness; and the intermediate metal layers includes a third thickness; and (b) the first thickness is greater than or equal to a sum of the second and third thicknesses. Other embodiments are described herein.
Public/Granted literature
- US20170011997A1 Thickened Stress Relief and Power Distribution Layer Public/Granted day:2017-01-12
Information query
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