Invention Grant
- Patent Title: Apparatus for manufacturing large scale single crystal monolayer of hexagonal boron nitride and method for manufacturing the same
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Application No.: US15298367Application Date: 2016-10-20
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Publication No.: US10240253B2Publication Date: 2019-03-26
- Inventor: ChanYong Hwang
- Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Applicant Address: KR Daejeon
- Assignee: Korea Reseach Institute of Standards and Science
- Current Assignee: Korea Reseach Institute of Standards and Science
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2016-0032312 20160317
- Main IPC: C30B25/18
- IPC: C30B25/18 ; H01L29/20 ; C30B25/08 ; C30B25/14 ; C30B25/16 ; C30B29/38 ; C30B23/02 ; C30B29/40

Abstract:
A method for manufacturing a large-scale single crystal monolayer of hBN including: preparing a single crystal copper substrate of (111) face in a chemical vapor deposition (CVD) apparatus; removing impurities of the single crystal copper substrate of (111) face; forming a plurality of hBN crystal seeds by depositing a vaporized ammonia borane or a vaporized borazine on the surface of the single crystal copper substrate from which the impurities are removed; and forming a large-scale single crystal monolayer of hBN grown by mutual coherence between the hBN crystal seeds, an apparatus for manufacturing the same, and a substrate for a monolayer UV graphene growth using the same.
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