- 专利标题： Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism
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申请号： US15021499申请日： 2014-09-01
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公开(公告)号： US10253777B2公开(公告)日： 2019-04-09
- 发明人: Yoshiyuki Sakaguchi , Akihiko Wada , Takashi Kabasawa
- 申请人： Edwards Japan Limited
- 申请人地址： JP Chiba
- 专利权人： Edwards Japan Limited
- 当前专利权人： Edwards Japan Limited
- 当前专利权人地址： JP Chiba
- 代理机构： Westman, Champlin & Koehler, P.A.
- 代理商 Theodore M. Magee
- 优先权： JP2013-205599 20130930; JP2014-016476 20140131
- 国际申请： PCT/JP2014/072913 WO 20140901
- 国际公布： WO2015/045748 WO 20150402
- 主分类号： F04D19/04
- IPC分类号： F04D19/04
摘要：
The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
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