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公开(公告)号：US20230264235A1
公开(公告)日：2023-08-24
申请号：US18004248
申请日：2021-07-30
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
CPC classification number: B08B9/027 , B08B7/0071 , B08B7/0092 , B08B7/04 , B08B1/005 , B08B1/04 , F04D19/042 , B08B2209/027 , H01L21/67017
Abstract: A cleaning apparatus for a vacuum exhaust system capable of preventing redeposition of deposits on a downstream side of a vacuum pump is provided. A cold trap capable of causing deposits to be formed by cooling gas containing a sublimation component, at least one first vacuum pump disposed upstream of the cold trap, at least one first piping connecting the first vacuum pump to the cold trap, at least one second vacuum pump disposed downstream of the cold trap, and at least one second piping connecting the second vacuum pump to the cold trap are provided. At least a part of the first vacuum pump or the first piping is configured to be heated to higher than or equal to a sublimation temperature of the sublimation component. The cold trap is configured to be cooled to less than or equal to the sublimation temperature of the sublimation component.
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公开(公告)号：US20230049439A1
公开(公告)日：2023-02-16
申请号：US17793128
申请日：2021-01-20
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Yasushi Tateno , Yohei Ogawa
Abstract: A vacuum pump and a stator column wherein partition walls from an outer peripheral surface of the stator column toward an inner periphery of a rotor blade are provided at two spots, and a groove-shaped channel in a circumferential direction is provided. A sectional area of the channel changes in the circumferential direction. As a result, the pressure difference between a front and a rear of the partition wall on a downstream side is made uniform regardless of a location, and a flowrate of the gas passing through a gap between the partition wall on the downstream side and the inner peripheral surface of the rotor blade is made uniform regardless of the location. The change in the sectional area is achieved either by changing a depth of the groove-shaped channel or by changing an interval between the partition walls at the two spots.
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公开(公告)号：US20220333612A1
公开(公告)日：2022-10-20
申请号：US17640149
申请日：2020-09-07
Applicant: Edwards Japan Limited
Inventor： Koichi Ichihara , Takashi Kabasawa
Abstract: A vacuum pump capable of removing side reaction products without overhaul is provided. The vacuum pump includes A motor for rotating a rotor, a heater capable of raising a temperature, a base spacer for holding the heater, a controller capable of controlling the heater by switching an operation mode between a normal operation mode and a cleaning operation mode, and a storage portion storing information on a set temperature relating to the heater, the storage portion stores at least first temperature information for the normal operation mode, or more specifically, set temperature information capable of using the pump without nonconformity, second temperature information for the cleaning operation mode, or more specifically, set temperature information capable of re-gasifying side reaction products generated during the normal operation mode, and the temperature represented by the second temperature information is higher than the temperature represented by the first temperature information.
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公开(公告)号：US20220235777A1
公开(公告)日：2022-07-28
申请号：US17611816
申请日：2020-05-22
Applicant: Edwards Japan Limited
Inventor： Yoshihiro Enomoto , Takashi Kabasawa
IPC: F04D19/04
Abstract: A vacuum pump in which a spark is not generated even when a rotor component and a stator component are brought into contact, and an explosive reaction in a vacuum container can be prevented, and a protection portion provided in the vacuum pump are provided. On head part sides of a thread ridge to a thread ridge of a threaded spacer with a narrow clearance of a gas channel therebetween, a protection portion 1a to a protection portion made of non-metal are formed in a peripheral state. A protection portion is similarly formed in the peripheral state also on an inner peripheral surface side of a stator blade spacer opposed to a distal end of a rotor blade with a narrow clearance of the gas channel. The protection portion is formed of non-metal with a sufficient thickness so that metal materials of base materials are not brought into contact with each other even when a rotor blade and a stationary portion are brought into contact with each other.
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公开(公告)号：US11346349B2
公开(公告)日：2022-05-31
申请号：US16495296
申请日：2018-03-02
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: A vacuum pump includes: a rotating portion and a stator portion between which an internal flow path is formed; an exhaust mechanism which sends gas from a suction port toward an outlet port through the internal flow path; and a main sensor for detecting that a deposited material has reached a prescribed thickness at a detection object position of the internal flow path, wherein the main sensor includes at least a pair of electrodes disposed in the internal flow path at an interval corresponding to the prescribed thickness, and a capacitance detection circuit which is connected to the pair of electrodes and which detects a capacitance between the pair of electrodes, and the capacitance detection circuit detects that a deposited material in the internal flow path has reached the prescribed thickness on the basis of a drop in an increase rate of the capacitance.
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Patent Agency Ranking
公开(公告)号：US11009040B2
公开(公告)日：2021-05-18
申请号：US15115094
申请日：2015-01-08
Applicant: Edwards Japan Limited
Inventor： Manabu Nonaka , Takashi Kabasawa
Abstract: To provide a vacuum pump capable of heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and prevents the accumulation of a product that is caused by a decrease in the temperature of process gas near the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.
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公开(公告)号：US11009028B2
公开(公告)日：2021-05-18
申请号：US16335021
申请日：2017-08-29
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: In a vacuum pump, the proportion of hole portions at a distal end (outer peripheral side/outer peripheral portion) of a stator disc is locally increased. More specifically, hole portions of substantially the same size are provided in parallel from the inner peripheral side to the outer peripheral side of the stator disc, and the number of hole portions provided in the outermost row is set to be larger than the number of hole portions provided in an inner row. Hole portions of substantially the same size are provided in parallel from the inner peripheral side to the outer peripheral side of the stator disc, and some of hole portions provided in the outermost row are integrated to be a single hole portion. T shaped hole portions are provided in the stator disc. L shaped hole portions are provided in the stator disc.
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公开(公告)号：US20150184669A1
公开(公告)日：2015-07-02
申请号：US14417037
申请日：2013-07-24
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Manabu Nonaka
CPC classification number: F04D29/023 , B24C1/08 , F04D19/042 , F04D19/044 , F04D29/26 , F05D2300/516 , F05D2300/603 , F05D2300/611 , Y10T428/24355
Abstract: Provided are a vacuum pump part and a vacuum pump suitable for performing adequately the processing of forming a coating on the surface of a fiber-reinforced composite material. In a vacuum pump part, a plating layer, which is a coating serving as a coating layer, is formed on the surface of a second cylindrical member of a cylindrical shape which is constituted by a fiber-reinforced composite material. The plating layer is formed through a removal processing step for removing a surface portion including a parting agent layer from the surface of the second cylindrical member of a cylindrical shape, and a roughening step for roughening a surface of the second cylindrical member after the surface portion including the parting agent layer has been removed.
Abstract translation: 提供了一种真空泵部件和真空泵，其适用于在纤维增强复合材料的表面上充分地进行形成涂层的加工。 在真空泵部中，在由纤维增强复合材料构成的圆筒状的第二筒状构件的表面上形成作为涂层的涂层的镀层。 通过去除处理步骤形成镀层，用于从圆筒形的第二圆柱形构件的表面去除包括分离剂层的表面部分，以及在表面部分之后粗糙化第二圆柱形构件的表面的粗糙化步骤 包括分离剂层已被除去。
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公开(公告)号：US20250043790A1
公开(公告)日：2025-02-06
申请号：US18719616
申请日：2023-01-11
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
Main-body casings and a rotating body installed rotatably in the main-body casings are provided, and the rotating body has a structure that a second component is caused to cover a periphery of a first component disposed on an inner side. The second component is formed by solidifying a powder. The first component is formed of at least any one of an extruded material, a cast material, and a forged material. The second component is formed of a green pellet.-
公开(公告)号：US12123420B2
公开(公告)日：2024-10-22
申请号：US17793128
申请日：2021-01-20
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Yasushi Tateno , Yohei Ogawa
CPC classification number: F04D19/042 , F04D27/001 , F04D29/083 , F05D2210/12
Abstract: A vacuum pump and a stator column wherein partition walls from an outer peripheral surface of the stator column toward an inner periphery of a rotor blade are provided at two spots, and a groove-shaped channel in a circumferential direction is provided. A sectional area of the channel changes in the circumferential direction. As a result, the pressure difference between a front and a rear of the partition wall on a downstream side is made uniform regardless of a location, and a flowrate of the gas passing through a gap between the partition wall on the downstream side and the inner peripheral surface of the rotor blade is made uniform regardless of the location. The change in the sectional area is achieved either by changing a depth of the groove-shaped channel or by changing an interval between the partition walls at the two spots.
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