VACUUM PUMP AND COOLING COMPONENT THEREOF

    公开(公告)号:US20210207619A1

    公开(公告)日:2021-07-08

    申请号:US17057940

    申请日:2018-05-30

    IPC分类号: F04D29/58 F04D19/04

    摘要: A cooling component includes a plurality of port pairs a flow path through which refrigerant flows, the refrigerant communicating with each of the ports of the plurality of port pairs, and a setting means for setting a usage pattern of the plurality of port pairs. The plurality of port pairs are provided along a circumferential direction of the casing. The setting means sets a selected port pair such that the refrigerant is supplied from outside into the flow path using the first port of the selected port pair and refrigerant is discharged from the flow path to outside using the second port of the selected port pair, and sets another port pair such that the refrigerant cannot be supplied from outside into the flow path or discharged from the flow path using the other port pair.

    Outlet port part and vacuum pump
    2.
    发明授权

    公开(公告)号:US11009044B2

    公开(公告)日:2021-05-18

    申请号:US15129266

    申请日:2015-02-27

    摘要: An outlet port part has a heat insulating portion for preventing heat obtained from a heater disposed in the outlet port part from being transmitted toward a base side, and for transmitting the heat efficiently to the back (the vacuum pump side) of the outlet port. The heat insulating portion of the outlet port part is provided with a flange portion formed on the outer peripheral surface of the outlet port part, and a heat insulating spacer disposed in close contact with the flange portion. Alternatively, an outlet port part flange portion that is configured by integrating the flange portion formed on the outer peripheral surface of the outlet port part and the foregoing heat insulating spacer functions as the heat insulating portion. This configuration can efficiently increase the temperature of the entire outlet port of the vacuum pump, thereby reducing the amount of product and deposit.

    Stator-side member and vacuum pump

    公开(公告)号:US10704555B2

    公开(公告)日:2020-07-07

    申请号:US14422173

    申请日:2013-08-26

    摘要: The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.

    VACUUM PUMP, AND MAGNETIC BEARING DEVICE AND ANNULAR ELECTROMAGNET USED IN VACUUM PUMP

    公开(公告)号:US20200166041A1

    公开(公告)日:2020-05-28

    申请号:US16612911

    申请日:2018-04-20

    IPC分类号: F04D19/04 H02K7/09

    摘要: Bobbins of an annular electromagnet each have a bobbin body that has a coil wire wound around an outer periphery thereof and is attached to a respective tooth of an annular stator core by having the corresponding tooth inserted therethrough. A first flange portion in a rectangular hallow shape is provided on an end surface of the bobbin body near the center of the annular stator core and a second flange portion in a rectangular hallow shape is provided on the other end surface of the bobbin body. A coil winding amount increasing means is formed at least on the first flange portion or the second flange portion and increases the amount of winding of the coil wire wound around the bobbin body.

    Stator component of vacuum pump
    6.
    发明授权

    公开(公告)号:US10260515B2

    公开(公告)日:2019-04-16

    申请号:US14917772

    申请日:2014-06-06

    摘要: The present invention provides a stator component of a vacuum pump, which is suitable for reducing the fracture energy (energy of fracture that occurs when a rotor of the pump is damaged during its rotation) and the size of the pump, and also provides a vacuum pump having this stator component. In the vacuum pump, a spacer or of a thread groove pump stator, which is a stator component forms a gap satisfying the following > between an outer circumferential surface of each of housed in a pump case of the vacuum pump, and an inner circumferential surface of the pump case, with the stator component being housed in the pump case. > 2d/D≤εmax, where D is the outer diameter of the stator component (spacer or thread groove pump stator), d is the width of the gap, and εmax is the breaking elongation of the stator component.

    THREAD GROOVE PUMP MECHANISM, VACUUM PUMP INCLUDING THREAD GROOVE PUMP MECHANISM, AND ROTOR, OUTER CIRCUMFERENCE SIDE STATOR, AND INNER CIRCUMFERENCE SIDE STATOR USED IN THREAD GROOVE PUMP MECHANISM
    7.
    发明申请
    THREAD GROOVE PUMP MECHANISM, VACUUM PUMP INCLUDING THREAD GROOVE PUMP MECHANISM, AND ROTOR, OUTER CIRCUMFERENCE SIDE STATOR, AND INNER CIRCUMFERENCE SIDE STATOR USED IN THREAD GROOVE PUMP MECHANISM 审中-公开
    螺旋泵机构,包括螺旋泵机构的真空泵,以及转子,外圆周侧定子和在螺旋泵机构中使用的内循环侧定子

    公开(公告)号:US20160222971A1

    公开(公告)日:2016-08-04

    申请号:US15021499

    申请日:2014-09-01

    IPC分类号: F04D19/04

    摘要: The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.

    摘要翻译: 本发明提供了一种螺纹槽泵机构,其抑制螺纹槽泵机构中的气体的回流,并且减小在螺纹槽泵机构的出口附近的泵径向的压力差,从而提高排气性能和压缩 性能。 本发明还提供了一种真空泵,其包括螺纹槽泵机构,以及在螺纹槽泵机构中使用的转子,外周侧定子和内周侧定子。 螺纹槽泵机构包括在与转子缸部相对的外周侧定子的相对面上雕刻的外周侧螺纹槽部和内周侧螺纹槽部中刻刻的排气性能改善单元 在与转子筒部相对的内周侧定子的相对面上。

    Vacuum pump and vacuum pump component

    公开(公告)号:US12044241B2

    公开(公告)日:2024-07-23

    申请号:US17286968

    申请日:2019-10-24

    摘要: To provide a vacuum pump that is capable of efficiently cooling gas and requires less maintenance. The vacuum pump includes: a main body casing having an inlet portion and an outlet portion for gas; a turbomolecular pump mechanism portion in which a stator blade and a rotor blade are formed; a thread groove pump mechanism portion provided at a downstream side of the turbomolecular pump mechanism portion; a cooling trap portion that cools the gas led out from the turbomolecular pump mechanism portion and causes the gas to flow out to a side of the thread groove pump mechanism portion; and a partition wall that guides the gas led out from the turbomolecular pump mechanism portion to the cooling trap portion.

    Vacuum pump and vacuum pump component

    公开(公告)号:US11933310B2

    公开(公告)日:2024-03-19

    申请号:US17610957

    申请日:2020-05-22

    IPC分类号: F04D19/04 F04D29/40

    CPC分类号: F04D19/042 F04D29/403

    摘要: A main-body casing having an inlet port or an outlet port, a rotatable rotor shaft, and a rotor coupled to the rotor shaft are provided. A recess portion opened toward the inlet port is formed in the rotor and a fastening portion (a first shaft portion and a second shaft portion) of the rotor shaft is exposed to the recess portion. A cover portion, which is fastened to the fastening portion by a cover-portion fixing bolt and covers at least a part of the recess portion, is formed having a container shape and has a reinforcing portion located in a periphery of the fastening portion that prevents deflection by increasing rigidity. The cover portion also has a contact-pressure generating portion which is pressed by fastening to the fastening portion in a fastening direction and causes a contact pressure to be generated in the fastening direction.

    VACUUM PUMP
    10.
    发明公开
    VACUUM PUMP 审中-公开

    公开(公告)号:US20240011496A1

    公开(公告)日:2024-01-11

    申请号:US18252286

    申请日:2021-12-03

    IPC分类号: F04D19/04 F04D29/54

    CPC分类号: F04D19/042 F04D29/547

    摘要: A vacuum pump includes a casing having an inlet port, and enclosing a rotating body, a thread groove stator which is substantially cylindrical and is disposed on an outer periphery of the rotating body, and a thread groove which is formed in at least one of an outer peripheral surface of the rotating body and an inner peripheral surface of the thread groove stator, the vacuum pump exhausting gas sacked from a side of the inlet port to outside of the casing by rotating the rotating body, wherein a binding means, which is formed of a material having a linear expansion coefficient lower than a linear expansion coefficient of a material of the thread groove stator and reduces radial deformation at a time of thermal expansion of the thread groove stator, is disposed on an outer periphery of the thread groove stator.